Method of manufacturing semiconductor device
View Patent ↗A method of manufacturing a semiconductor device is disclosed in which a metallic deposit is stably formed on the anode side with small variation in film thickness, and plating is prevented on the cathode side without carrying out any additional processing on the cathode side. The processed anode side causes no interference in subsequent processing. Insulator films are used to cover a scribe line, as well as a field plate or an open electrode provided on a surface of a silicon substrate before Ni electroless plating of an aluminum electrode is performed to form a metallic deposit on the electrode.
1. A method of manufacturing a semiconductor device, comprising:
providing a metal electrode on both the top and bottom surface of a semiconductor substrate, wherein the metal electrode on the top surface is an aluminum electrode,
forming a scribe line on one of the surfaces of the semiconductor substrate,
covering the scribe line and the side face of the semiconductor substrate with an insulator film, and then
covering the metal electrode on the top surface only with a metal of a different kind from that of the metal electrode by electroless plating.
2. A method of manufacturing a semiconductor device, comprising:
forming on a top surface of a semiconductor substrate an element region having a metal electrode on each surface of the semiconductor substrate and further having a metal field plate around a perimeter of the element region, wherein the metal electrode on the top surface is an aluminum electrode,
covering the field plate with an insulator film, and then
covering the metal electrode on the top surface of the semiconductor substrate in the element region with a metal of a different kind from that of the metal electrode by electroless plating.
3. A method of manufacturing a semiconductor device, comprising:
providing on a semiconductor substrate a first metal electrode for wire bonding and a second metal electrode for soldering, wherein the first and second metal electrodes are aluminum electrodes,
covering the first metal electrode for wire bonding with an insulator film, and then
covering the second metal electrode for soldering with a metal of a different kind from those of the first and second metal electrodes by electroless plating.
4. A method of manufacturing a semiconductor device, comprising:
providing a metal electrode on both the top and bottom surface of a semiconductor substrate, wherein the metal electrode on the top surface is an aluminum electrode,
connecting the metal electrode on one of the surfaces of the semiconductor substrate and the metal electrode on the opposite surface to make both electrodes at the same potential, and then
covering both of the metal electrodes with a metal of a different kind from those of the metal electrodes by electroless plating.
5. The method according to claim 1 , wherein the metal electrode on the top surface is the anode.