Chip-on-glass array substrate of liquid crystal display device and method of fabricating the same
View Patent ↗An array substrate device for a liquid crystal display device includes a gate line, a gate pad connected to a first end of the gate line, a gate insulating layer covering the gate line and the gate pad, a data line over the gate insulating layer and crossing the gate line to define a pixel region, a data pad connected to a first end of the data line, a thin film transistor disposed at a crossing region of the gate and data lines, a first inorganic insulating layer formed on the substrate covering the thin film transistor, the data line, and the data pad, a first organic insulating layer along an entire surface of the first inorganic insulation layer except at portions corresponding to the gate and data pads, a transparent pixel electrode disposed over the first organic insulating layer and connected to the thin film transistor, and a transparent gate pad terminal and a data pad terminal disposed over the first organic insulating layer and connected to the gate and data pads, respectively.
1. A method of fabricating an array substrate device for a liquid crystal display device, comprising:
forming a gate line and a gate pad on a substrate, the gate line disposed along a first direction and the gate pad is connected to a first end of the gate line;
forming a gate insulating layer over the substrate to cover the gate line and the gate pad;
forming a data line and a data pad over the gate insulating layer, the data line disposed along a second direction to cross the gate line to define a pixel region, and the data pad is connected to a first end of the data line;
forming a thin film transistor at a crossing region of the gate and data lines;
sequentially forming a first inorganic insulating layer and a first organic insulating layer over the substrate to cover the thin film transistor, the data line, and the data pad;
patterning the first organic insulating layer to expose portions of the first inorganic insulating layer corresponding to the gate and data pads;
forming a second inorganic insulating layer over the patterned first organic insulating layer and over the exposed portions of the first organic insulating layer;
simultaneously patterning the second inorganic insulating layer, the first organic insulating layer, and the first inorganic insulating layer to form first, second, and third contact holes; and
forming a transparent pixel electrode, and a transparent gate pad terminal, and a data pad terminal over the second inorganic insulating layer,
wherein the pixel electrode contacts a portion of the thin film transistor through the first contact hole, and the gate pad terminal and data pad terminal contact the gate and data pads through the second and third contact holes, respectively.
2. The method according to claim 1 , further comprising forming gate and data driving IC chips connected to the gate and data terminals, respectively, through electrically conductive bumps.
3. The method according to claim 1 , wherein the first and second inorganic insulating layers include one of silicon nitride and silicon oxide, and the first organic insulating layer includes one of benzocyclobutene (BCB) and acrylic resin.
4. The method according to claim 1 , wherein the first contact hole penetrates through the first and second inorganic insulating layers and the first organic insulating layer to expose a portion of the thin film transistor.
5. The method according to claim 1 , wherein the second contact hole penetrates through the gate insulating layer and the first and second inorganic insulating layers to expose a portion of the gate pad.
6. The method according to claim 1 , wherein the second contact hole penetrates through the first and second inorganic insulating layers to expose a portion of the data pad.
7. The method according to claim 1 , wherein the thin film transistor includes a gate electrode, an active layer, an ohmic contact layer, a source electrode, and a drain electrode, and wherein the pixel electrode contacts the drain electrode.