Layout method for miniaturized memory array area
View Patent ↗Bit lines and a pair of two tungsten wires having the same widths are formed at a portion where a through-hole is to be formed such that the bit lines and the tungsten wires are arranged at regular intervals. A through-hole for connection to another wiring layer is formed between the tungsten wires. A connection wiring made of tungsten is formed over the through-hole so as to have a predetermined margin around the through-hole. In a photolithography process, a slit having a small width enough to be insensitive to a photo-resist is formed so as to span the through-hole.
1. A layout method for forming a plurality of wires substantially in parallel on one wiring layer, having in a memory array area at least one connecting hole for connecting at least one of the plurality of wires to wiring on another wiring layer, the method comprising:
forming the plurality of wires at the same intervals, the plurality of wires having the same widths and being arranged at regular pitches; and
forming said at least one connecting hole between two adjacent wires of the plurality of wires; and
forming a wiring connecting the two adjacent wires to the connecting hole;
covering said at least one connecting hole with a connection wiring in a wire pattern; and
forming a slit with a length direction parallel to the length direction of the plurality of wires at a center of the connection wiring using a photolithography process.
2. The layout method according to claim 1 , wherein the ratio of L/S is one, where L represents the width of the plurality of wires and S represents the wire spacing between any two adjacent wires.
3. The layout method according to claim 1 , wherein the connection wiring spanning two adjacent wires covers two of said connecting holes, the two connecting holes being arranged side by side on a center line of the connection wiring.
4. The layout method according to claim 1 , wherein the at least one connecting hole and the at least two adjacent wires are formed in a same wiring layer.
5. The layout method according to claim 1 , wherein the slit has a width from 0.07 micrometers to 0.08 micrometers.
6. The layout method according to claim 1 , wherein the at least one connecting hole is formed at a center of a space between the two adjacent wires, and a width of each of the plurality of wires is 0.12 micrometers, a spacing between any two adjacent wires of the plurality of wires is 0.12 micrometers, and an area of each of the at least one connecting hole is 0.20 micrometers squared.
7. A layout method for forming a plurality of wires substantially in parallel on one wiring layer, having in a memory array area at least one connecting hole for connecting at least one of the plurality of wires to wiring on another wiring layer, the method comprising:
forming the plurality of wires at the same intervals, the plurality of wires having the same widths and being arranged at regular pitches;
forming said at least one connecting hole between two adjacent wires of the plurality of wires, and
covering said at least one connecting hole with a connection wiring in a wire pattern,
wherein the connection wiring spanning two adjacent wires covers two of said connecting holes, the two connecting holes being arranged side by side on a center line of the connection wiring, and
wherein a slit is formed at a center of the connection wiring using a photolithography process, the slit having a length direction parallel to the length direction of the plurality of wires.
8. A wiring layer, having in a memory array area at least one connecting hole for connecting at least one of a plurality of wires to wiring on another wiring layer, the wiring layer comprising:
the plurality of wires formed substantially in parallel and at the same intervals on the wiring layer, the plurality of wires having the same widths and being arranged at regular pitches; and
a wiring connecting the two adjacent wires to the connecting hole,
wherein said at least one connecting hole is formed between two adjacent wires of the plurality of wires;
wherein said at least one connecting hole is covered with a connection wiring in a wire pattern; and
wherein a center space of the connection wiring has a slit with a length direction parallel to the length direction of the plurality of wires at a center of the connection wiring, the slit being formed using a photolithography process.
9. The wiring layer according to claim 8 , wherein the ration of L/S is one, where L represents the width of the plurality of wires and S represents the wire spacing between any two adjacent wires.
10. The wiring layer according to claim 8 , wherein the connection wiring spanning two adjacent wires covers two of said connecting holes, the two connecting holes being arranged side by side on a center line of the connection wiring.
11. The wiring layer according to claim 8 , wherein the at least one connecting hole and the at least two adjacent wires are formed in a same wiring layer.
12. A wiring layer, having in a memory array area at least one connecting hole for connecting at least one of a plurality of wires to wiring on another wiring layer, the wiring layer comprising:
the plurality of wires formed substantially in parallel and at the same intervals on the wiring layer, the plurality of wires having the same widths and being arranged at regular pitches;
wherein said at least one connecting hole is formed between two adjacent wires of the plurality of wires and covered with a connection wiring in a wire pattern,
wherein the connection wiring spanning two adjacent wires covers two of said connecting holes, the two connecting holes being arranged side by side on a center line of the connection wiring, and
wherein a center space of the connection wiring has a slit formed at a center of the connection wiring using a photolithography process, the slit having a length direction parallel to the length direction of the plurality of wires.
13. A layout method in a memory array area, the method comprising:
forming a plurality of wires, arranged at regular pitches, each of the plurality of wires having a same width;
forming at least one connecting hole between two adjacent wires of the plurality of wires;
forming a wiring coupling the two adjacent wires to the connecting hole; and
forming a slit with a length direction parallel to a length direction of the plurality of wires at a center of the wiring coupling the two adjacent wires to the connecting hole using a photolithography process.
14. The layout method of claim 13 , wherein the plurality of wires, the at least one connecting hole, and the wiring are formed on a same layer.
15. The layout method of claim 13 , wherein the slit has a width from 0.07 micrometers to 0.08 micrometers.
16. The layout method of claim 13 , wherein the at least one connecting hole is formed at a center of a space between the two adjacent wires, and a width of each of the plurality of wires is 0.12 micrometers, a spacing between any two adjacent wires of the plurality of wires is 0.12 micrometers, and an area of each of the at least one connecting hole is 0.20 micrometers squared.