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App. No. 10/877,726 · Confirmation No. 5231

Methods for forming a gap filling layer using high density plasma

Inventor: Young Min Kwon
Abandoned -- Failure to Respond to an Office Action View Publication ↗
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2006-08-03 ABN Abandonment 2 View
2006-04-14 N570 Communication - Re: Power of Attorney (PTOL-308) 2 View
2006-03-29 PA.. Power of Attorney 4 View
2006-03-28 CTAV Advisory Action (PTOL-303) 3 View
2006-03-28 EXIN Examiner Interview Summary Record (PTOL - 413) 3 View
2006-03-27 WFEE Fee Worksheet (SB06) 1 View
2006-03-24 ANE.I Amendment After Final or under 37CFR 1.312, initialed by the examiner. 1 View
2006-03-17 A.NE Response After Final Action 1 View
2006-03-17 CLM Claims 2 View
2006-03-17 REM Applicant Arguments/Remarks Made in an Amendment 3 View
2006-03-17 XT/ Extension of Time 1 View
2006-03-17 LET. Miscellaneous Incoming Letter 1 View
2005-11-21 CTFR Final Rejection 7 View
2005-11-21 892 List of references cited by examiner 1 View
2005-11-21 SRFW Search information including classification, databases and other search related notes 1 View
2005-11-17 SRNT Examiner's search strategy and results 2 View
2005-03-30 A... Amendment/Request for Reconsideration-After Non-Final Rejection 2 View
2005-03-30 SPEC Specification 3 View
2005-03-30 CLM Claims 2 View
2005-03-30 REM Applicant Arguments/Remarks Made in an Amendment 3 View
2005-03-30 DRW Drawings-only black and white line drawings 1 View
2005-03-30 WFEE Fee Worksheet (SB06) 1 View
2005-03-30 WCLM Claims Worksheet (PTO-2022) 1 View
2005-01-04 CTNF Non-Final Rejection 8 View
2005-01-04 1449 List of References cited by applicant and considered by examiner 1 View
2005-01-04 892 List of references cited by examiner 1 View
2005-01-04 FOR Foreign Reference 3 View
2005-01-04 FWCLM Index of Claims 1 View
2005-01-04 SRFW Search information including classification, databases and other search related notes 1 View
2004-06-25 136A Authorization for Extension of Time all replies 4 View
2004-06-25 SPEC Specification 9 View
2004-06-25 CLM Claims 2 View
2004-06-25 ABST Abstract 1 View
2004-06-25 DRW Drawings-only black and white line drawings 3 View
2004-06-25 OATH Oath or Declaration filed 3 View
2004-06-25 IDS Information Disclosure Statement (IDS) Form (SB08) 3 View
2004-06-25 FRPR Certified Copy of Foreign Priority Application 17 View
2004-06-25 WFEE Fee Worksheet (SB06) 1 View
2004-06-25 WFEE Fee Worksheet (SB06) 1 View
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Quick Facts
App. No.
10/877,726
Filed
2004-06-25
Pub. No.
US20040266218A1
Art Unit
2813