Liquid crystal display device and fabrication method thereof
View Patent ↗A liquid crystal display device and a method of fabrication thereof that simplify a fabrication process of the LCD and improve contact resistance properties. A liquid crystal display device according to an embodiment of the present invention includes a substrate; a TFT (thin film transistor) on the substrate, the TFT having a gate electrode, a source electrode and a drain electrode; a passivation layer having a contact hole near the drain electrode on the substrate; a metal layer on the drain electrode, the metal layer deposited through the contact hole; and a pixel electrode formed on the substrate, the pixel electrode being electrically connected to the drain electrode via the metal layer.
1. A method of fabricating a liquid crystal display device, comprising:
depositing and patterning a first metal layer to form a gate line, a gate electrode, a common line and a gate pad on a substrate;
forming a gate insulating layer and an active layer on the substrate having the gate line, the gate electrode, the common line and the gate pad;
depositing and patterning a second metal layer to form a source electrode and a drain electrode of a TFT (thin film transistor), a storage electrode of a storage capacitor, a data line and a data pad on the substrate having the gate insulating layer and the active layer;
depositing a passivation layer on the substrate having the source electrode and the drain electrode of the TFT, the storage electrode of the storage capacitor, the data line and the data pad;
forming and patterning a photo-resist layer to form contact holes within the passivation layer;
etching the passivation layer using the patterned photo-resist layer as a mask to form the contact holes;
depositing a third metal layer without stripping the patterned photo-resist layer;
stripping the patterned photo-resist layer by a lift-off process simultaneously to remove the patterned photo-resist layer and the third metal layer thereon; and
depositing and patterning a conductive layer to form a pixel electrode and a contact pad on the substrate having the contact holes,
wherein the lift-off process is carried out using a stripper solution having a glycol-based component or a DI (DeIonized water)-based component, when the third metal layer is formed of molybdenum.
2. The method according to claim 1 , wherein the first metal layer is a single layer of an Al-based metal.
3. The method according to claim 1 , wherein the second metal layer is a single layer of an Al-based metal or a double layer of Al/Mo.
4. The method according to claim 1 , wherein the contact holes are formed in regions of the drain electrode, the storage electrode, the gate pad and the data pad.
5. The method according to claim 1 , wherein the conductive layer is formed of a material selected from the group consisting of ITO, IZO and ITZO.
6. The method according to claim 1 , wherein the third metal layer on the gate pad, the data pad, the drain electrode, the storage electrode remains after the lift-off process.
7. A method of fabricating a liquid crystal display device, the method comprising:
depositing and patterning a metal layer to form a gate line, a gate electrode, a common line and a gate pad on a substrate;
depositing a gate insulating layer, an active layer and a second metal layer on the substrate having the gate line, the gate electrode, the common line and the gate pad;
forming a source electrode, a drain electrode, a storage electrode of a storage capacitor, a data line and a data pad on the substrate using a half-tone photo-resist layer pattern formed by a diffraction exposure process;
depositing a passivation layer on the substrate having the source electrode and the drain electrode, the storage electrode of the storage capacitor, the data line and the data pad;
forming and patterning a photo-resist layer to form contact holes within the passivation layer;
etching the passivation layer using the patterned photo-resist layer as a mask to form the contact holes;
depositing a third metal layer on an entire area of the substrate having the contact holes, and
stripping the patterned photo-resist layer through a lift-off process simultaneously to remove the patterned photo-resist layer and the third metal layer thereon; and
depositing and patterning a conductive layer to form a pixel electrode and a contact pad on the substrate having the contact holes,
wherein the lift-off process is carried out using a stripper solution having a glycol-based component or a DI (DeIonized water)-based component, when the third metal layer is formed of molybdenum.
8. The method according to claim 7 , wherein the first metal layer is a single layer of an Al-based metal.
9. The method according to claim 7 , wherein the second metal layer is a single layer of an Al-based metal or a double layer of Al/Mo.
10. The method according to claim 7 , wherein the contact holes are formed in regions of the drain electrode, the storage electrode, the gate pad and the data pad.
11. The method according to claim 7 , wherein the conductive layer is formed of a material selected from the group consisting of ITO, IZO and ITZO.
12. The method according to claim 7 , wherein the third metal layer on the gate pad, the data pad, the drain electrode, the storage electrode remains after the lift-off process.