Angle sensor having low waveform distortion
View Patent ↗A magnetoresistive element includes a meandering X-axis array that is constituted by X-axis segments alternately connected, and a meandering Y-axis array that is constituted by Y-axis segments alternately connected. When rotated 90°, the Y-axis array has the same layout as the X-axis array. Such a structure cancels the electrical resistance change due to the AMR effect, thus reducing the waveform distortion of output voltage.
1. An angle sensor comprising:
a magnetoresistive element that includes a pinned magnetic layer having a fixed magnetization direction and a free magnetic layer having a magnetization direction that varies in proportion to an external magnetic field;
a substrate for supporting the magnetoresistive element; and
a rotor that forms a magnetic field and faces the magnetoresistive element,
wherein the magnetoresistive element includes an X-axis array in an X-axis direction being the width direction of the substrate and a Y-axis array in a Y-axis direction being the depth direction of the substrate, the X-axis array including a plurality of segments that extend in the X-axis direction and are spaced at a predetermined interval in the Y-axis direction, the predetermined interval being shorter than the length of the X-axis segments, ends of adjacent X-axis segments being connected so as to form a single meandering structure, the Y-axis array including a plurality of segments that extend in the Y-axis direction and are spaced at a predetermined interval in the X-axis direction, the predetermined interval being shorter than the length of the Y-axis segments, ends of adjacent Y-axis segments being connected so as to form a single meandering structure, and the magnetoresistive element has a single continuous structure in which the X-axis array and the Y-axis array are connected to each other at their ends, and
wherein the X-axis segments and the Y-axis segments have a width of 20 μm or more, and the ratio of length to width is less than 11.
2. The angle sensor according to claim 1 , wherein the X-axis segments and the Y-axis segments have the same length and the same width.