Thermal flow sensor having streamlined packaging
A thermal flow sensor has a first, second and third substrate, each having a first side and a second opposite side. The first substrate is connected to the second substrate such that the second side of the first substrate abuts the first side of the second substrate. The third substrate is connected to the second substrate such that the second side of the second substrate abuts the first side of the third substrate. The first, second and third substrate form a multi-layer body structure having at least one edge extending between a first side of the first substrate and the second side of the third substrate. The second substrate has a groove formed therein so as to form a conduit bounded by the second substrate and the second side of the first substrate and the first side of the third substrate. The conduit has an inlet opening and an outlet opening that are formed in the at least one edge.
1. A thermal flow sensor comprising;
a first substrate having a first side and a second opposite side;
a second substrate having a first side and a second opposite side, said first substrate being connected to said second substrate such that said second side of said first substrate abuts said first side of said second substrate;
a third substrate having a first side and a second opposite side, said third substrate being connected to said second substrate such that said second side of said second substrate abuts said first side of said third substrate; and
wherein said first, second and third substrate forming a multi-layer body structure having at least one edge extending between a first side of said first substrate and said second side of said third substrate; said second substrate having a groove formed therein so as to form a conduit bounded by said second substrate and said second side of said first substrate and said first side of said third substrate, said conduit having an inlet opening and an outlet opening, each of said openings being formed in said at least one edge.
2. The thermal flow sensor according to claim 1 , wherein said inlet opening is disposed solely in said second substrate.
3. The thermal flow sensor according to claim 2 , wherein said outlet opening is disposed solely in said second substrate.
4. The thermal flow sensor according to claim 1 , further comprising:
a heater disposed on said first side of said first substrate opposed to said conduit; and
a first temperature sensor disposed on said first side of said first substrate opposed to said conduit.
5. The thermal flow sensor according to claim 1 , further comprising:
a second temperature sensor disposed on said first side of said first substrate opposed to said conduit.
6. The thermal flow sensor according to claim 5 , further comprising a cap mounted on said first side of said first substrate thereby forming an interior chamber, said heater, said first temperature sensor and said second temperature sensor being disposed within said interior chamber.
7. The thermal flow sensor according to claim 6 , wherein said cap is brazed to said first substrate thereby forming a sealed interior chamber.
8. The thermal flow sensor according to claim 7 , further comprising electronics within said chamber and electrically connected to said heater, said first temperature sensor and said second temperature sensor to permit said electronics to communicate by telemetry to a control unit.
9. The thermal flow sensor according to claim 1 , wherein said first and third substrate are made of borosilicate glass.
10. The thermal flow sensor according to claim 9 , wherein said second substrate is made of silicon.
11. The thermal flow sensor according to claim 1 , wherein said first substrate is bonded to said second substrate and said second substrate is bonded to said third substrate.
12. A thermal flow sensor comprising:
a first substrate having a first side and a second opposite side;
a second substrate having a first side and a second opposite side, said first substrate being connected to said second substrate such that said second side of said first substrate abuts said first side of said second substrate;
wherein said first and second substrate forming a multi-layer body structure having at least one edge extending between a first side of said first substrate and said second side of said second substrate; at least one of said first substrate and said second substrate having a groove formed therein so as to form a conduit bounded by said first and second substrates, said conduit having an inlet opening and an outlet opening, each of said openings being formed in said at least one edge of said multi-layer body structure; further comprising:
a heater disposed on said first side of said first substrate opposed to said conduit; and
a first temperature sensor disposed on said first side of said first substrate opposed to said conduit.
13. The thermal flow sensor according to claim 12 , wherein said inlet opening is disposed solely in said second substrate.
14. The thermal flow sensor according to claim 13 , wherein said outlet opening is disposed solely in said second substrate.
15. The thermal flow sensor according to claim 12 , further comprising:
a second temperature sensor disposed on said first side of said first substrate opposed to said conduit.
16. The thermal flow sensor according to claim 15 , further comprising a cap mounted on said first side of said first substrate thereby forming an interior chamber, said heater, said first temperature sensor and said second temperature sensor being disposed within said interior chamber.
17. The thermal flow sensor according to claim 16 , wherein said cap is brazed to said first substrate thereby forming a sealed interior chamber.
18. The thermal flow sensor according to claim 17 , further comprising electronics within said chamber and electrically connected to said heater, said first temperature sensor and said second temperature sensor to permit said electronics to communicate by telemetry to a control unit.
19. The thermal flow sensor according to claim 12 , wherein said first substrate is made of borosilicate glass.
20. The thermal flow sensor according to claim 19 , wherein said second substrate is made of silicon.
21. The thermal flow sensor according to claim 12 , wherein said first substrate is bonded to said second substrate.
22. A thermal flow sensor comprising:
a first substrate having a first upper side and a second opposite lower side, and at least one side edge extending between said first upper side and said second lower side, a conduit formed therein having an inlet opening and an outlet opening, each of said openings being formed in said at least one edge;
a heater disposed on said first side off said first substrate opposed to said conduit; and
a first temperature sensor disposed on said first side of said first substrate opposed to said conduit.
23. The thermal flow sensor according to claim 22 , further comprising:
a second temperature sensor disposed on said first side of said first substrate opposed to said conduit.
24. The thermal flow sensor according to claim 23 , further comprising a cap mounted on said first side of said first substrate thereby forming an interior chamber, said heater, said first temperature sensor and said second temperature sensor being disposed within said interior chamber.
25. The thermal flow sensor according to claim 24 , wherein said cap is brazed to said first substrate thereby forming a sealed interior chamber.
26. The thermal flow sensor according to claim 25 , further comprising electronics within said chamber and electrically connected to said heater, said first temperature sensor and said second temperature sensor to permit said electronics to communicate by telemetry to a control unit.
27. A method of determining the flow rate of a fluid within a conduit within a body, said body having a first upper side and a second opposite lower side, and at least one side edge extending between said first upper side and said second lower side, a conduit formed within the body having an inlet opening and an outlet opening, each of said openings being formed in said at least one side edge, said method comprising the steps of:
permitting a fluid to enter into the inlet opening of the conduit;
heating the fluid with a heater disposed on the first side of the body opposed to and remote from the conduit;
detecting a temperature of the fluid with a first temperature sensor disposed on the first side of the body opposed to and remote from the conduit;
permitting the fluid to exit from exit opening of the conduit;
determining the flow rate of the fluid based on the detected temperature;
disposing the heater on said first side of said first substrate opposed to said conduit; and
disposing the first temperature sensor on said first side of said first substrate opposed to said conduit.
28. The method according to claim 27 , wherein said fluid is a liquid.
29. The method according to claim 27 , wherein said liquid is cerebro spinal fluid.