Method for use in making a write coil of magnetic head
View Patent ↗Methods suitable for use in making a write coil of a magnetic head includes the steps of forming a seed layer made of ruthenium (Ru) over a substrate; forming, over the seed layer, a patterned resist having a plurality of write coil trenches patterned therein; electroplating electrically conductive materials within the plurality of write coil trenches to thereby form a plurality of write coil layers; removing the patterned resist; and performing a reactive ion etch (RIE) in ozone gas (O 3 ) for removing exposed seed layer materials in between the plurality of write coil layers. Advantageously, the write coil layers remain undamaged from the RIE in the ozone gas. Other structures may be fabricated in a similar manner.
1. A method for use in making a write coil of a magnetic head, comprising:
forming a seed layer comprising ruthenium (Ru) over a substrate;
forming, over the seed layer, a patterned resist having a plurality of write coil trenches patterned therein;
electroplating electrically conductive materials within the plurality of write coil trenches to thereby form a plurality of write coil layers;
removing the patterned resist; and
performing a reactive ion etch (RIE) in ozone gas for removing exposed seed layer materials in between the plurality of write coil layers.
2. The method of claim 1 , wherein a pitch between the coil layers is 0.5 microns or less.
3. The method of claim 1 , wherein the write coil layers remain unetched from the RIE in ozone gas.
4. The method of claim 1 , wherein a volatile compound including at least one of RuO 4 and RuO 3 is produced from the RIE in ozone gas.
5. The method of claim 1 , wherein the electrically conductive materials comprise copper (Cu).
6. The method of claim 1 , wherein the seed layer is formed over an insulator layer.
7. The method of claim 1 , wherein the seed layer is formed over a pole piece layer of the magnetic head.
8. The method of claim 1 , further comprising:
forming a plurality of insulator layers in between the plurality of write coil layers.
9. The method of claim 1 , wherein the seed layer consists of ruthenium (Ru).
10. A method for use in forming an electroplated structure, comprising:
forming a seed layer comprising ruthenium (Ru) over a substrate;
forming, over the seed layer, a patterned resist having one or more trenches patterned therein;
electroplating materials within the one or more trenches to form one or more electroplated structures;
removing the patterned resist; and
performing a reactive ion etch (RIE) in ozone gas for removing exposed seed layer materials.
11. The method of claim 10 , wherein a pitch between the one or more trenches is 0.5 microns or less.
12. The method of claim 10 , wherein the one or more electroplated structures remain unetched from the RIE in ozone gas.
13. The method of claim 10 , wherein a volatile compound including at least one of RuO 4 and RuO 3 is produced from the RIE in ozone gas.
14. The method of claim 10 , wherein the electroplated materials comprise copper (Cu).
15. The method of claim 10 , wherein the electroplated materials comprise magnetic materials.
16. The method of claim 10 , wherein the seed layer is formed over an insulator layer.
17. The method of claim 10 , wherein the seed layer is formed over a pole piece layer of a magnetic head.
18. The method of claim 10 , wherein the seed layer consists of ruthenium (Ru).
19. A magnetic head having a write coil formed by a method comprising the steps of:
forming a seed layer comprising ruthenium (Ru) over a substrate;
forming, over the seed layer, a patterned resist having a plurality of write coil trenches patterned therein;
electroplating electrically conductive materials within the plurality of write coil trenches to thereby form a plurality of write coil layers;
removing the patterned resist; and
performing a reactive ion etch (RIE) in ozone gas (O 3 ) for removing exposed seed layer materials in between the plurality of write coil layers.
20. The magnetic head of claim 19 , wherein a pitch between the coil layers is 0.5 microns or less.
21. The magnetic head of claim 19 , wherein the write coil layers remain unetched from the RIE in ozone gas.
22. The magnetic head of claim 19 , wherein a volatile compound including at least one of RuO 4 and RuO 3 is produced from the RIE in ozone gas.
23. The magnetic head of claim 19 , wherein the electrically conductive materials comprise copper (Cu).
24. The magnetic head of claim 19 , wherein the seed layer is formed over an insulator layer.
25. The magnetic head of claim 19 , wherein the seed layer is formed over a pole piece layer of the magnetic head.
26. The magnetic head of claim 19 , further comprising:
forming a plurality of insulator layers in between the plurality of write coil layers.
27. The magnetic head of claim 19 , wherein the seed layer consists of ruthenium (Ru).