Ink jet printhead chip with planar actuators
View Patent ↗A printhead chip for an inkjet printhead includes a wafer substrate that incorporates drive circuitry and defines a plurality of ink inlet channels. A plurality of nozzle arrangements is positioned on the wafer substrate. Each nozzle arrangement includes side walls and a roof wall positioned on the substrate to define a nozzle chamber such that one of the ink inlet channels opens into the nozzle chamber. The roof wall defines an ink ejection port. A substantially planar, elongate actuator is positioned in the nozzle chamber to overlie the respective ink inlet channel. The actuator incorporates a heater layer that includes an electrical circuit that is connected to the drive circuitry layer at one end of the actuator and at least one expansion layer that is fast with the heater layer. The heater layer is positioned so that the expansion layer experiences differential thermal expansion and contraction when the heater layer receives an electrical signal from the drive circuitry layer and the actuator is displaced towards and away from the ink ejection port to eject a drop of ink from the nozzle chamber.
1. A printhead chip for an inkjet printhead, the printhead chip comprising
a wafer substrate that incorporates drive circuitry, the wafer substrate defining a plurality of ink inlet channels; and
a plurality of nozzle arrangements positioned on the wafer substrate, each nozzle arrangement comprising
side walls and a roof wall positioned on the substrate to define a nozzle chamber such that one of the ink inlet channels opens into the nozzle chamber, the roof wall defining an ink ejection port; and
a substantially planar, elongate actuator that is positioned in the nozzle chamber to overlie the respective ink inlet channel, the actuator incorporating a heater layer that comprises an electrical circuit that is connected to the drive circuitry layer at one end of the actuator and at least one expansion layer that is fast with the heater layer, the heater layer being positioned so that the expansion layer experiences thermal expansion when the heater layer receives an electrical signal from the drive circuitry layer and the actuator is displaced towards the ink ejection port to eject a drop of ink from the nozzle chamber.
2. A printhead chip as claimed in claim 1 , in which each actuator includes a first expansion layer positioned between the heater layer and the substrate and a second expansion layer positioned between the heater layer and the roof wall.
3. A printhead chip as claimed in claim 2 , in which each actuator is positioned to define a gap between the actuator and the substrate, the gap being between six and ten microns thick.
4. A printhead chip as claimed in claim 3 , in which the first expansion layer has a hydrophobic surface such that an air bubble is formed in the gap subsequent to the ejection of the drop of ink from the nozzle chamber.
5. A printhead chip as claimed in claim 3 , in which the second expansion layer has a hydrophilic surface.
6. A printhead chip as claimed in claim 2 , in which the expansion layers are both of polytetrafluoroethylene.