Thin film transistor and method of fabricating the same
View Patent ↗A thin film transistor which can be used in an LCD display panel includes an insulator substrate, a gate electrode located on the insulator substrate, an insulator film provided on the insulator substrate and the gate electrode, and a polycrystalline silicon film located on the insulator film. A channel is defined in a first portion of the polycrystalline silicon film over the gate electrode, and a drain and a source are defined in second and third portions of the polycrystalline silicon film over the insulator substrate. Grain sizes of the drain and source are equal to or greater than a grain size of the channel.
1. A method of fabricating a thin film transistor comprising the steps of:
forming a gate electrode on an insulator substrate;
forming a gate insulator film over the insulator substrate and the gate electrode;
forming an amorphous silicon film on the gate insulator film;
irradiating laser light on a surface of the amorphous silicon film to heat the amorphous silicon film, thereby forming a polycrystalline silicon film;
setting energy of the laser light such that a grain size of a first portion of the polycrystalline silicon film over the insulator substrate becomes equal to or greater than a grain size of a second portion of the polycrystalline silicon film over the gate electrode; and
defining a source and a drain of the thin film transistor in the first portion and defining a channel of the thin film transistor in the second portion, wherein the step of setting the energy of the laser light includes the steps of:
setting a maximum energy of the laser light such that grain sizes of the drain and the source become substantially equal to a grain size of the channel; and
setting a minimum energy of the laser light to obtain a grain size of the channel enough to provide a desired device characteristic of the thin film transistor.
2. The method according to claim 1 , wherein the grain size of the channel which is enough to provide the desired device characteristic of the thin film transistor lies in a range of about 500 Å to about 20000 Å.
3. The method according to claim 1 , wherein the grain size of the channel which is enough to provide the desired device characteristic of the thin film transistor lies in a range of about 1500 Å to about 20000 Å.
4. The method according to claim 1 , wherein the grain size of the channel which is enough to provide the desired device characteristic of the thin film transistor lies in a range of about 3000 Å to about 10000 Å.