Thin film transistor array panel for a liquid crystal display and a method for manufacturing the same
View Patent ↗Disclosed is a simplified manufacturing method for liquid crystal displays. A gate wire including a gate line, a gate pad and a gate electrode is formed on an insulating substrate. Next, a gate insulating layer covering the gate wire, a semiconductor layer, an ohmic contact layer, and a data conductive layer are sequentially deposited, and a photoresist pattern is formed on the data conductive layer. Following this step, the data conductive layer, using the photoresist pattern as an etch mask, is etched to form a data wire including a data line, a source electrode, a drain electrode, and a data pad. Next, the photoresist pattern is reflowed to cover the portion between the source electrode and the drain electrode, and a portion of the ohmic contact layer adjacent to a periphery of the data wire. Subsequently, portions of the ohmic contact layer and the semiconductor layer, which are not covered by the photoresist pattern, are etched, and the photoresist pattern is removed. Next, a portion of the ohmic contact layer, which is not covered by the data wire, is etched to expose a portion of the semiconductor layer between the source electrode and the drain electrode that is a channel portion of a thin film transistor. Finally, a protection layer, a pixel electrode, a redundant gate pad and a redundant data pad are formed.
1. A thin film transistor array panel for liquid crystal display comprising:
a gate wire formed on an insulating substrate and comprising a gate line and a gate electrode;
a gate insulating layer covering the gate wire;
a semiconductor layer formed on the gate insulating layer;
a data wire formed on the semiconductor layer and comprising a data line, a source electrode and a drain electrodes; and
a pixel electrode electrically connected to the drain electrodes,
wherein the semiconductor layer has a boundary broader than that of the data wire.
2. The thin film transistor array panel of claim 1 , further comprising an ohmic contact layer having a planar shape substantially the same with that of the data wire.
3. The thin film transistor array panel of claim 1 , further comprising a passivation layer formed between the data wires and the pixel electrodes.
4. The thin film transistor array panel of claim 3 , wherein the passivation layer is formed of silicon nitride or an organic insulating material.
5. The thin film transistor array panel of claim 3 , wherein the passivation layer has a first contact hole exposing a portion of the drain electrode.
6. The thin film transistor array panel of claim 5 , wherein the passivation layer has a second contact hole exposing a portion of the data line and a third contact hole exposing a portion of the gate line.
7. The thin film transistor array panel of claim 1 , wherein the pixel electrode is formed of a transparent conductive material.
8. The thin film transistor array panel of claim 1 , wherein the data line is formed of Mo, Mo alloy, Cr, Al, an Al alloy or Ta.
9. The thin film transistor array panel of claim 1 , wherein the gate wire further comprises a gate pad.
10. The thin film transistor array panel of claim 9 , further comprising a redundant gate pad formed on the gate pad.
11. The thin film transistor array panel of claim 10 , wherein the redundant gate pad and the pixel electrode are formed of the same material.
12. The thin film transistor array panel of claim 1 , wherein the data wire further comprises a data pad.
13. The thin film transistor array panel of claim 12 , further comprising a redundant data pad formed on the data pad.
14. The thin film transistor array panel of claim 12 , wherein the redundant data pad and the pixel electrode are formed of the same material.
15. The thin film transistor array panel of claim 13 , wherein the semiconductor layer has a portion overlapped by the redundant data pad.
16. The thin film transistor array panel of claim 15 , wherein the semiconductor layer has a boundary boarder than that of the redundant data pad.