Microwave plasma nozzle with enhanced plume stability and heating efficiency
View Patent ↗Systems and methods for generating relatively cool microwave plasma. The present invention provides a microwave plasma nozzle that includes a gas flow tube through which a gas flows, and a rod-shaped conductor that is disposed in the gas flow tube and has a tapered tip near the outlet of the gas flow tube. A portion of the rod-shaped conductor extends into a microwave cavity to receive microwaves passing in the cavity. These received microwaves are focused at the tapered tip to heat the gas into plasma. The microwave plasma nozzle also includes a vortex guide between the rod-shaped conductor and the gas flow tube imparting a helical shaped flow direction around the rod-shaped conductor to the gas flowing through the tube. The microwave plasma nozzle further includes a mechanism for electronically exciting the gas and a shielding mechanism for reducing a microwave power loss through the gas flow tube.
1. A microwave plasma nozzle for generating plasma from microwaves and a gas, comprising:
a gas flow tube for having a gas flow therethrough, said gas flow tube having an outlet portion made of a material that is substantially transparent to microwaves; and
a rod-shaped conductor disposed in said gas flow tube and operative to transmit microwaves along the surface thereof, said rod-shaped conductor having first and second ends, said first end including a tapered tip disposed in proximity to and surrounded by said outlet portion of said gas flow tube, said outlet portion of said gas flow tube having an open end opening around a distal end of the tip,
wherein said microwaves transmitted along the surface heat up the gas flow to generate plasma at said tapered tip.
2. A microwave plasma nozzle as defined in claim 1 , further comprising:
a vortex guide disposed between said rod-shaped conductor and said gas flow tube, said vortex guide having at least one passage angled with respect to a longitudinal axis of said rod-shaped conductor for imparting a helical shaped flow direction around said rod-shaped conductor to a gas passing along said at least one passage.
3. A microwave plasma nozzle as defined in claim 1 , wherein said rod-shaped conductor has a circular cross-section.
4. A microwave plasma nozzle as defined in claim 1 , wherein said outlet portion of said gas flow tube is made of a material that is substantially transparent to microwaves and said gas flow tube has an upper portion made of a material that is substantially transparent to microwaves, and an intermediate portion made of a conducting material located between the outlet portion and the upper portion.
5. A microwave plasma nozzle as defined in claim 1 , wherein the material that is substantially transparent to microwaves is a dielectric material.
6. A microwave plasma nozzle as defined in claim 1 , further comprising:
a shield disposed within a portion of said gas flow tube for reducing a microwave power loss through said gas flow tube.
7. A microwave plasma nozzle as defined in claim 6 , wherein said shield includes a conducting material.
8. A microwave plasma nozzle as defined in claim 1 , further comprising:
a grounded shield having a portion disposed within said gas flow tube and configured to reduce a microwave power loss through said gas flow tube.
9. A microwave plasma nozzle as defined in claim 1 , further comprising:
a microwave cavity, said second end of said rod-shaped conductor being disposed in the microwave cavity and operative to collect microwaves from the microwave cavity.
10. A microwave plasma nozzle as defined in claim 1 , wherein said rod-shaped conductor has a cross-sectional shape of at least one of oval, elliptical and oblong.
11. A microwave plasma nozzle for generating plasma from microwaves and a gas, comprising:
a gas flow tube for having a gas flow therethrough, said gas flow tube having an outlet portion made of a material that is substantially transparent to microwaves;
a rod-shaped conductor disposed in said gas flow tube and operative to transmit microwaves along the surface thereof, said rod-shaped conductor having first and second ends, said first end including a tapered tip disposed in proximity to and surrounded by said outlet portion of said gas flow tube; and
a microwave cavity, said second end of said rod-shaped conductor being disposed in the microwave cavity and operative to collect microwaves from the microwave cavity,
wherein said microwaves transmitted along the surface of said rod-shaped conductor heat up the gas flow to generate plasma at said tapered tip, and said microwave cavity includes a wall, said wall of said microwave cavity forming a portion of a gas flow passage operatively connected to an inlet portion of said gas flow tube.
12. A microwave plasma nozzle for generating plasma from microwaves and a gas, comprising:
a gas flow tube for having a gas flow theretrough, said gas flow tube having an outlet portion made of a material that is substantially transparent to microwaves;
a rod-shaped conductor disposed in said gas flow tube and operative to transmit microwaves along the surface thereof, said rod-shaped conductor having first and second ends, said first end including a tapered tip disposed in proximity to and surrounded by said outlet portion of said gas flow tube, wherein said microwaves transmitted along the surface heat up the gas flow to generate plasma at said tapered tip; and
a microwave cavity for transmitting source microwaves therethrough, said second end portion of said rod-shaped conductor being disposed in the microwave cavity and operative to collect a portion of the source microwaves, a portion of said microwave cavity forming a gas flow passage and being operatively connected to an inlet portion of said gas flow tube.
13. A microwave plasma nozzle for generating plasma from microwaves and a gas, comprising:
a gas flow tube for having a gas flow therethrough, said gas flow tube having an outlet portion made of a material that is substantially transparent to microwaves;
a rod-shaped conductor disposed in said gas flow tube and operative to transmit microwaves along the surface thereof, said rod-shaped conductor having first and second ends, said first end including a tapered tip disposed in proximity to and surrounded by said outlet portion of said gas flow tube, said outlet portion of said gas flow tube having an open end opening around a distal end of the tip; and
a vortex guide disposed between said rod-shaped conductor and said gas flow tube, said vortex guide having at least one passage angled with respect to a longitudinal axis of said rod-shaped conductor for imparting a helical shaped flow direction around said rod-shaped conductor to a gas passing along said at least one passage,
wherein the microwaves transmitted along the surface heat up the gas flow to generate plasma at said tapered tip.
14. A microwave plasma nozzle as defined in claim 13 , further comprising means for reducing a microwave power loss through said gas flow tube, a portion of said means being positioned within said gas flow tube.
15. A microwave plasma nozzle as defined in claim 14 , wherein said means is grounded.
16. A microwave plasma nozzle as defined in claim 13 , further comprising a grounded shield having a portion disposed within said gas flow tube.
17. A microwave plasma nozzle as defined in claim 13 , further comprising means for electronically exciting a gas that passes through said gas flow tube.
18. A plasma generating system, comprising:
a microwave cavity having a wall forming a portion of a gas flow passage;
a gas flow tube for having a gas flow therethrough, said gas flow tube having an outlet portion made of a material that is substantially transparent to microwaves, said gas flow tube having an inlet portion connected to said portion of the gas flow passage to receive the gas flow from the microwave cavity; and
a rod-shaped conductor disposed in said gas flow tube, said rod-shaped conductor having first and second end portions, said first end portion including a tapered tip disposed in proximity to said outlet portion of said gas flow tube, said second end portion of said rod-shaped conductor being disposed in said microwave cavity and operative to collect microwaves,
wherein the microwaves collected by said second end portion heat up the gas flow to generate plasma at the tapered tip.
19. A plasma generating system as defined in claim 18 , further comprising means for reducing a microwave power loss while microwaves are transmitted through said gas flow tube, said means having a portion disposed within the gas flow tube.
20. A plasma generating system as defined in claim 18 , further comprising a vortex guide disposed between said rod-shaped conductor and said gas flow tube, said vortex guide having at least one passage angled with respect to a longitudinal axis of said rod-shaped conductor for imparting a helical shaped flow direction around said rod-shaped conductor to a gas passing along said at least one passage.
21. A plasma generating system as defined in claim 18 , further comprising a shield disposed within a portion of said gas flow tube.
22. A plasma generating system as defined in claim 18 , further comprising a grounded shield having a portion disposed within said gas flow tube and configured to reduce a microwave power loss through said gas flow tube.
23. A plasma generating system as defined in claim 18 , further comprising means for electronically exciting a gas that passes through said gas flow tube.
24. A plasma generating system, comprising:
a microwave generator for generating microwave;
a power supply connected to said microwave generator for providing power thereto;
a microwave cavity having a wall forming a portion of a gas flow passage;
a waveguide operatively connected to said microwave cavity for transmitting microwaves thereto from said microwave generator;
an isolator for dissipating microwaves reflected from said microwave cavity;
a gas flow tube for having a gas flow therethrough, said gas flow tube having an outlet portion made of a material that is substantially transparent to microwaves, said gas flow tube having an inlet portion connected to the gas flow passage of said microwave cavity; a rod-shaped conductor disposed in said gas flow tube, said rod-shaped conductor having first and second end portions, said first end portion including a tapered tip disposed in proximity to said outlet portion of said gas flow tube, said second end portion of said rod-shaped conductor being disposed in said microwave cavity and operative to collect microwaves; and
a vortex guide disposed between said rod-shaped conductor and said gas flow tube, said vortex guide having at least one passage angled with respect to a longitudinal axis of said rod-shaped conductor for imparting a helical shaped flow direction around said rod-shaped conductor to a gas passing along said at least one passage.
25. A plasma generating system as defined in claim 24 , wherein said isolator includes:
a dummy load for dissipating microwaves; and
a circulator attached to said dummy load for directing the microwaves reflected from said microwave cavity to said dummy load.
26. A plasma generating system as defined in claim 24 , further comprising a shield that includes a portion disposed within said gas flow tube.
27. A plasma generating system as defined in claim 26 , wherein said shield is grounded.
28. A plasma generating system as defined in claim 24 , further comprising:
a phase shifter for controlling a phase of microwaves within said microwave cavity.
29. A plasma generating system as defined in claim 28 , wherein said phase shifter is a sliding short circuit.
30. A plasma generating system defined in claim 24 , further comprising means for electronically exciting a gas that passes through said gas flow tube.
31. A method for generating plasma using microwaves, said method comprising the steps of:
providing a microwave cavity that has a wall forming a gas flow passage;
providing a gas flow tube operatively connected to the gas flow passage of the microwave cavity, said gas flow tube having an outlet portion made of a material that is substantially transparent to microwaves;
providing a rod-shaped conductor having first and second end portions, said first end portion including a tapered tip;
disposing said tapered tip of the rod-shaped conductor in proximity to the outlet portion of the gas flow tube and disposing said second end portion of the rod-shaped conductor in the microwave cavity;
providing a gas to the gas flow tube via said gas flow passage;
transmitting microwaves to the microwave cavity;
collecting the transmitted microwaves using said second end portion of the rod-shaped conductor; and
generating plasma using the gas provided in said step of providing a gas to the gas flow tube and using the microwaves received in said step of collecting.
32. A method for generating plasma as defined in claim 31 , further comprising the step of:
electronically exciting the gas provided in said step of providing a gas to the gas flow tube, prior to said step of generating plasma.
33. A method for generating plasma as defined in claim 31 , further comprising the step of:
disposing a portion of a means for reducing a microwave power loss through the gas flow tube within said gas flow tube, prior to said step of generating plasma.
34. A method for generating plasma as defined in claim 31 , further comprising the step of:
imparting a helical shaped flow direction around the rod-shaped conductor to the gas provided in said step of providing a gas to the gas flow tube.
35. A method for generating plasma, comprising:
providing a microwave cavity;
providing a gas flow tube operatively connected to the microwave cavity;
providing a rod-shaped conductor having a tapered tip;
disposing a first portion of the rod-shaped conductor adjacent an outlet portion of the gas flow tube and disposing a second portion of the rod-shaped conductor in the microwave cavity;
providing a gas to the gas flow tube;
transmitting microwaves to the microwave cavity;
receiving the transmitted microwaves using at least the second portion of the rod-shaped conductor; and
generating plasma using the gas provided in said step of providing a gas to the gas flow tube and using the microwaves received in said step of receiving,
wherein the step of providing a gas to the gas flow tube includes the steps of:
providing a gas flow passage in a wall of the microwave cavity;
connecting an inlet portion of the gas flow tube to the gas flow passage provided in said step of providing a gas flow passage in a wall of the microwave cavity; and
providing the gas to the gas flow passage.
36. A microwave plasma nozzle unit for generating plasma, comprising:
a gas flow tube for having a gas flow therethrough, said gas flow tube having an outlet portion made of a non-conducting material; and
a rod-shaped conductor disposed in said gas flow tube, said rod-shaped conductor having first and second ends, said first end including a tapered tip disposed in proximity to said outlet portion of said gas flow tube, said outlet portion of said gas flow tube having an open end opening around a distal end of the tip; and
a microwave cavity for containing microwaves therein, said second end being positioned within said microwave cavity and operative to collect a portion of the microwaves contained in the microwave cavity,
wherein the portion of the microwaves collected by the second end heat up the gas flow to generate plasma at the tapered tip.
37. A microwave plasma nozzle unit as defined in claim 36 , wherein said outlet portion of said gas flow tube is made of a material that is transparent to microwaves, and a portion of said gas flow tube extending from the outlet portion is made of a conducting material.
38. A microwave plasma nozzle for generating plasma from microwaves and a gas, comprising:
a gas flow tube for having a gas flow therethrough, said gas flow tube having a portion including a conducting material;
a rod-shaped conductor disposed in said gas flow tube, said rod-shaped conductor having a tapered tip disposed in proximity to an outlet portion of said gas flow tube; and
a shield having a portion disposed on an inner surface of said gas flow tube.