Apparatus for coating photoresist
View Patent ↗Disclosed is a photoresist coating apparatus capable of preventing a substrate from being contaminated and preventing a pattern bridge phenomenon from being created in the substrate during an exposure process by shielding backflow of photoresist through forcibly exhausting photoresist to an exterior. The photoresist coating apparatus includes a vacuum chuck for holding a substrate by using vacuum, a driving motor connected to the vacuum chuck through an arm, a first nozzle for coating photoresist onto the substrate, a second nozzle for performing a rinse process, a bath surrounding the vacuum chuck to prevent photoresist from being discharged to an exterior, a first drain pipe connected to both lower ends of the bath in order to discharge photoresist contained in the bath, and a photoresist discharge section for forcibly discharging photoresist contained in the bath to the exterior.
1. An apparatus for coating photoresist on a surface of a substrate during a semiconductor device manufacturing process, the apparatus comprising:
a vacuum chuck capable of holding a substrate thereon by using vacuum;
a driving motor connected to the vacuum chuck through an arm in order to supply rotational driving force to the substrate;
a first nozzle installed above the vacuum chuck in order to coat photoresist onto the substrate;
a second nozzle installed below the vacuum chuck in order to perform a rinse process with respect to a rear surface of the substrate;
a bath surrounding the vacuum chick including the substrate in order to prevent photoresist from being discharged to an exterior;
a first drain pipe connected to both lower ends of the bath in order to discharge photoresist contained in the bath;
a vane, coupled to said arm, forcing air in said bath toward said first drain pipe; and
a photoresist discharge section coupled to said first drain pipe to temporarily store photoresist introduced into the bath.
2. The apparatus as claimed in claim 1 , wherein the photoresist discharge section includes a storage tank connected to the first drain pipe in order to temporarily store photoresist introduced into the bath, a second drain pipe connected to a lower end of the storage tank, and first and second shut-off valves for opening/closing the first and second drain pipe.
3. The apparatus as claimed in claim 2 , wherein an opening/closing operation of the first shut-off valve is controlled by means of a synchronized signal created according to a rotation of the vacuum chuck.
4. The apparatus as claimed in claim 1 , wherein the vane coupled to said arm, is simultaneously rotated as the arm rotates, said vane having wings thereof at a predetermined angle so that photoresist contained in the bath is forcibly discharged to the drain pipe.
5. The apparatus as claimed in claim 4 , wherein the wings of the rotating member are developed at an angle of about 15 to 60°.
6. The apparatus as claimed in claim 1 , wherein the second nozzle includes a spray-type nozzle.