Method for fabricating a magnetic head including a read sensor
View Patent ↗A method for fabricating a magnetic head including a spin valve sensor having a sensor layer stack that includes a pinned magnetic layer, a spacer layer formed on the pinned magnetic layer, and a free magnetic layer formed on the spacer layer. In a preferred embodiment the spacer layer is comprised of CuO x . The method includes the plasma smoothing of the upper surface of the pinned magnetic layer prior to depositing the spacer layer, and a preferred plasma gas is a mixture of argon and oxygen.
1. A method for fabricating a magnetic head including a read sensor, comprising:
depositing a pinned magnetic layer;
exposing an upper surface of said pinned magnetic layer to an argon plus oxygen plasma, wherein said argon plus oxygen plasma includes oxygen in a concentration of from approximately 0.05% to approximately 0.6%;
depositing a spacer layer upon said upper surface of said pinned magnetic layer;
depositing a free magnetic layer upon said spacer layer,
wherein said argon plus oxygen plasma is used with a pressure of from approximately 1×10 −3 Torr to 3×10 −3 Torr, and the partial pressure of oxygen is from approximately 0.5×10 −6 to 6×10 −6 Torr.
2. A method for fabricating a magnetic head as described in claim 1 wherein said spacer layer is formed with a thickness of from approximately 16 Å to approximately 20 Å.
3. A method for fabricating a magnetic head as described in claim 1 wherein a magnetic coupling field exists across said spacer layer having a coupling field strength of from approximately −5 Oe to approximately −15 Oe.
4. A method for fabricating a magnetic head as described in claim 1 wherein said spacer layer is formed with a thickness of from approximately 16 Å to approximately 20 Å.
5. A method for fabricating a magnetic head as described in claim 1 , wherein said spacer layer is comprised of CuO.
6. A method for fabricating a magnetic head as described in claim 5 wherein a magnetic coupling field exists across said spacer layer having a coupling field strength of from approximately −5 Oe to approximately −15 Oe.
7. A method for fabricating a magnetic head including a read sensor, comprising:
depositing a pinned magnetic layer;
exposing an upper surface of said pinned magnetic layer to an argon plus oxygen plasma, wherein said argon plus oxygen plasma includes oxygen in a concentration of from approximately 0.05% to approximately 0.6%;
depositing a spacer layer upon said upper surface of said pinned magnetic layer;
depositing a free magnetic layer upon said spacer layer,
wherein said spacer layer is comprised of CuO,
wherein said argon plus oxygen plasma is used with a pressure of from approximately 1×10 −3 Torr to ×10 −3 Torr, and the partial pressure of oxygen is from approximately 0.5×10 −6 Torr to 6×10 −6 Torr.
8. A method for fabricating a magnetic head as described in claim 7 wherein said spacer layer is formed with a thickness of from approximately 16 Å to approximately 20 Å.
9. A method for fabricating a magnetic head including a read sensor, comprising:
depositing a pinned magnetic layer;
exposing an upper surface of said pinned magnetic layer to an argon plus oxygen plasma, wherein said argon plus oxygen plasma includes oxygen in a concentration of from approximately 0.05% to approximately 0.6%;
depositing a spacer layer upon said upper surface of said pinned magnetic layer;
depositing a free magnetic layer upon said spacer layer,
wherein a magnetic coupling field exists across said spacer layer having a coupling field strength of from approximately −5 Oe to approximately −15 Oe.
wherein said spacer layer is comprised of CuO,
wherein said argon plus oxygen plasma is used with a pressure of from approximately 1×10 −3 Torr to 3×10 −3 Torr, and the partial pressure of oxygen is from approximately 0.5×10 −3 Torr to 6×10 −6 Torr.
10. A method for fabricating a magnetic head as described in claim 9 wherein said spacer layer is formed with a thickness of from approximately 16Å to approximately 20 Å.