Apparatus for supplying a droplet on a substrate and method of manufacturing display apparatus using the same
View Patent ↗In an apparatus for supplying a droplet on a substrate and a method of manufacturing a display apparatus, the apparatus includes a base body, a dropping unit and a vapor supplying unit. The base body corresponds to the substrate disposed on a stage. The dropping unit is disposed on the base body. The dropping unit includes a nozzle to drop the droplet on the substrate. The vapor supplying unit is disposed adjacent to the dropping unit to supply the droplet dropped onto the substrate with a volatile solvent vapor. Therefore, an evaporation rate of the droplet dropped onto pixels is adjusted to uniformize a thickness of the layer, thereby improving the image display quality.
1. An apparatus for supplying a droplet on a substrate including a first region that extends along a first direction and a second region that is adjacent to the first region, the apparatus comprising:
a base body;
a dropping unit coupled to the base body and disposed between the base body and the substrate, the dropping unit including a nozzle plate having a plurality of nozzles to drop the droplet on the first region of the substrate and moving on the first region of the substrate along the first direction; and
a vapor supplying unit disposed adjacent to the dropping unit in a second direction perpendicular with respect to the first direction to spray a volatile solvent vapor on the second region of the substrate,
wherein the vapor supplying unit remains at a predetermined position while the dropping unit moves from a first end of the first region with respect to the first direction to a second end of the first region which is opposite to the first end of the first region.
2. The apparatus of claim 1 , wherein the droplet comprises a solute and a volatile solvent.
3. The apparatus of claim 2 , wherein the solute comprises a material that forms a hole injection layer, a material that that forms an electron injection layer, a material that forms an organic light emitting layer, a material that forms a color filter or an organic material having photoresist.
4. The apparatus of claim 1 , wherein the dropping unit is transported in the first direction and shifted in the second direction, and the vapor supplying unit is shifted in the second direction together with the dropping unit.
5. The apparatus of claim 4 , further comprising a base transporting unit to transport the base body in the second direction.