Method of manufacturing high sensitivity spin valve designs with ion beam treatment
View Patent ↗A method of manufacturing a GMR, TMR or CPP GMR sensor having a smooth interface between magnetic and non-magnetic layers to improve sensor performance by exposing a layer to a low energy ion beam prior to depositing a subsequent layer.
1. A method for manufacturing a magnetoresistive sensor, comprising:
depositing a first layer of magnetoresistive sensor material, the first layer of magnetoresistive sensor material having a horizontally disposed uppermost surface;
applying a low energy ion beam at the horizontally disposed uppermost surface of the first layer of magnetoresistive sensor material to smoothen the horizontally disposed uppermost surface, the low energy ion beam being at an energy that is below a sputtering threshold of the first layer of the magnetoresistive sensor material so as not to remove a significant portion of the first layer of magnetoresistive sensor material, the sputtering threshold of the first layer of magnetoresistive sensor material being a point at which atoms of the first layer of magnetoresistive sensor material begin to be emitted; and
after applying the low energy ion beam at the horizontally disposed uppermost surface of the first layer of magnetoresistive sensor material, depositing a second layer of material onto the smoothened horizontally disposed uppermost surface.
2. A method as in claim 1 wherein the low energy ion beam is formed by an ion beam source having an extraction voltage of no greater than 100 electron volts (EV).
3. A method as in claim 1 wherein the first layer of magnetoresistive sensor material is a magnetic layer and the second layer of material is a non-magnetic layer.
4. A method as in claim 1 wherein the first layer of magnetoresistive sensor material is a magnetic pinned layer and the second layer of material is a non-magnetic, electrically conductive spacer layer.
5. A method as in claim 1 wherein the first layer of magnetoresistive sensor material is a non-magnetic layer and the second layer of material is a magnetic layer.
6. A method as in claim 1 wherein the first layer of magnetoresistive sensor material is a non-magnetic, electrically conductive spacer layer and the second layer of material is a magnetic free layer.
7. A method as in claim 1 , wherein the first layer of magnetoresistive sensor material and second layer are deposited by ion beam deposition.
8. A method as in claim 1 , wherein the low energy ion beam is controlled by a substrate shutter.
9. A method as in claim 1 , wherein the low energy ion beam is formed by an ion beam source having an extraction voltage of about 25 electron volts (EV).
10. A method as in claim 1 , wherein the low voltage ion beam is applied for a sufficient length of time to substantially smooth a surface of the first layer of magnetoresistive sensor material.
11. A method as in claim 1 , wherein the first layer of magnetoresistive sensor material comprises a magnetic material and the second layer of material comprises Cu.
12. A method as in claim 1 , wherein the first layer of magnetoresistive sensor material comprises Co and the second layer comprises Cu.
13. A method as in claim 1 , wherein the first layer of magnetoresistive sensor material comprises CoFe and the second layer of material comprises Cu.
14. A method as in claim 1 , wherein the first layer of magnetoresistive sensor material comprises Cu and the second layer of material comprises Co.
15. A method as in claim 1 , wherein the low energy ion beam is applied for a time of about 30 seconds.