Clustered surface preparation for silicide and metal contacts
View Patent ↗A cluster tool is provided for the implementing of a clustered and integrated surface pre-cleaning of the surface of semiconductor devices. More particularly, there is provided a cluster tool and a method of utilization thereof in an integrated semiconductor device surface pre-cleaning, which is directed towards a manufacturing aspect in which a chamber for performing a dry processing chemical oxide removal (COR) on the semiconductor device surface is clustered with other tools, such as a metal deposition tool for silicide or contact formation, including the provision of a vacuum transfer module in the cluster tool.
1. A method for the integrated pre-cleaning of a semiconductor surface and surface preparation for forming metal and silicide contacts thereon; wherein said method is implemented in a cluster tool for the removal of a dry chemical oxide by a gaseous medium operating under a vacuum condition; comprising a plurality of segmented steps of:
providing a silicon semiconductor substrate having a native oxide film present on a surface thereof;
uninterruptedly and continuously imparting said vacuum condition to said semiconductor surface during the implementation of said method having said oxide film thereon;
performing said dry processing chemical oxide removal (COR) in a plasma-free application resulting in the absence of a plasma on said semiconductor surface for removing said native oxide film, while maintaining said vacuum condition so as to produce an oxygen-free semiconductor surface; and
without breaking said vacuum condition in order to avoid an exposure of said surface to air, depositing a metal on said oxygen-free semiconductor surface and forming said silicide and metal contacts on said surface.
2. A method as claimed in claim 1 , wherein said gaseous medium comprises nitrogen trifluoride (NF 3 ).
3. A method as claimed in claim 1 , wherein said metal is cobalt.
4. A method as claimed in claim 1 , wherein said silicide is cobalt silicide.
5. A method as claimed in claim 1 , wherein said metal is titanium for forming a titanium nitride on said semiconductor surface.