Nitride based semiconductor laser diode device with a bar mask
View Patent ↗A nitride based semiconductor laser diode device comprising a selective growth mask with a grating structure is proposed. The island-like stacked epitaxial layers including the P-type cladding layer is formed from the selective growth mask upon the active layer of the semiconductor laser structure. This proposed structure can reduce the strain by the deformation due to the isolate structure. Thus, increase of thickness of the cladding layer and/or increase of composition difference can be achieved without crack existing in the island-like stacked epitaxial layers. The optical confinement can be effectively improved.
1. A gallium nitride laser diode, comprising:
a substrate; and
a multi-layer structure for the gallium nitride laser diode, further including a lower bar mask substance, an N-type gallium nitride compound semiconductor (GNCS) cladding layer, an active layer, an upper bar mask substance, and a P-type gallium nitride compound semiconductor cladding layer, sequentially formed over the substrate.
2. The gallium nitride laser diode of claim 1 , wherein the upper bar mask substance is located over the active layer.
3. The gallium nitride laser diode of claim 1 , wherein bars of the upper bar mask substance are parallel and have a desired direction, wherein the bars have a thickness of about 100–2000 Angstroms and a width of 50–500 microns, and a distance between the parallel bars is about 1–10 microns.
4. The gallium nitride laser diode of claim 1 , wherein directions the upper bar mask substance and the lower mask substance are parallel to each other.