Method of fabricating a write element with a reduced yoke length
View Patent ↗A head including a write element for writing data to a magnetic media, and methods for its production are provided. A write element of the invention includes one or more of a recessed first pole, a heat sink layer, and a shortened yoke length. A method of the invention provides forming an anti-reflective layer before forming a mask layer. During photolithography the anti-reflective layer suppresses undesirable reflections off of features, such as vertical sidewalls, that otherwise limit how closely to such features portions of the mask layer can be formed.
1. A method of fabricating a write element comprising:
forming a base layer including a bottom pole and an zero throat insulation layer disposed over the bottom pole;
forming a cover insulation layer over at least a portion of the base layer;
forming an anti-reflective coating layer over the cover layer;
forming a mask layer including a coil opening over the anti-reflective coating layer;
forming a coil layer comprising coil turns within the coil opening, the coil turns comprising a first coil turn disposed at least partially over the zero throat insulation layer;
removing the mask layer to form a coil insulation opening;
forming a coil insulation layer within the coil insulation opening; and
forming a top layer over the coil layer.
2. The method of claim 1 wherein forming the base layer includes forming a hot seed layer over the bottom pole.
3. The method of claim 1 wherein forming the base layer includes forming a write gap layer over the bottom pole.
4. The method of claim 1 wherein forming the cover insulation layer includes depositing an inorganic material.
5. The method of claim 4 wherein depositing the inorganic material includes sputtering Al 2 O 3 .
6. The method of claim 1 wherein forming the cover insulation layer includes forming the cover insulation layer to a thickness of less than 1.0 μm.
7. The method of claim 1 wherein forming the anti-reflective coating layer includes depositing a silicon nitride compound.
8. The method of claim 7 wherein depositing the silicon nitride compound includes depositing SiNx.
9. The method of claim 7 wherein depositing the silicon nitride compound includes depositing SiONx.
10. The method of claim 1 wherein forming the anti-reflective coating layer includes depositing the anti-reflective coating to a thickness of about 80 Å to about 200 Å.
11. The method of claim 1 wherein forming the anti-reflective coating layer includes depositing the anti-reflective coating to a thickness of about 160 Å.
12. The method of claim 1 wherein forming the mask layer includes depositing and patterning a photoresist layer.
13. The method of claim 1 wherein forming the coil layer includes plating.
14. The method of claim 1 wherein forming the base layer includes forming a P2 layer including a P2 pole and a P2 backgap.
15. The method of claim 14 wherein forming the coil layer includes forming a first coil turn spaced apart from the P2 pole by the cover insulation layer.
16. The method of claim 14 wherein forming the coil layer includes forming a last coil turn spaced apart from the P2 backgap by the cover insulation layer.
17. The method of claim 14 wherein forming the coil layer includes forming the first coil turn spaced apart from the P2 pole by the cover insulation layer.
18. The method of claim 1 wherein forming the coil layer includes forming 5 coil turns.
19. The method of claim 1 wherein forming the coil layer includes forming a seed layer before forming the anti-reflective coating layer.
20. The method of claim 19 wherein removing the mask layer includes removing the seed layer between the coil turns.
21. The method of claim 20 wherein removing the seed layer includes ion milling.
22. The method of claim 1 wherein removing the mask layer includes removing the anti-reflective coating layer between the coil turns.
23. The method of claim 22 wherein removing the anti-reflective coating layer includes ion beam etching.
24. The method of claim 1 wherein forming the coil insulation layer includes depositing an inorganic material.
25. The method of claim 24 wherein depositing the inorganic material includes sputtering Al 2 O 3 .
26. The method of claim 24 wherein depositing the inorganic material includes covering the coil layer with the inorganic material.
27. The method of claim 1 wherein forming the top layer includes planarizing.
28. The method of claim 14 wherein forming the top layer includes planarizing to expose the P2 layer.
29. The method of claim 1 wherein forming the top layer includes forming a top pole.
30. A method of fabricating a write element comprising:
forming a base layer including
forming a bottom pole,
forming an zero throat insulation layer over the bottom pole, and
forming a P2 layer including a P2 pole and a P2 backgap over the bottom pole;
forming a cover insulation layer over portions of the bottom pole and zero throat insulation layer disposed between the P2 pole and P2 backgap, and over sidewalls of the P2 pole and P2 backgap;
forming an anti-reflective coating layer over the cover layer;
forming a mask layer including a coil opening over the anti-reflective coating layer;
forming a coil layer comprising coil turns within the coil opening, the coil turns comprising a first coil turn disposed at least partially over the zero throat insulation layer;
removing the mask layer to form a coil insulation opening;
forming a coil insulation layer within the coil insulation opening; and
forming a top layer over the coil layer.
31. The method of claim 30 wherein forming the P2 layer includes forming the P2 pole partially over the zero throat insulation layer.
32. The method of claim 30 wherein forming the base layer further includes forming a hot seed layer over the bottom pole.
33. The method of claim 32 wherein forming the hot seed layer includes forming a bottom pole pedestal.
34. The method of claim 32 wherein forming the base layer further includes forming a write gap layer over the hot seed layer.
35. The method of claim 34 wherein forming the base layer further includes forming a high moment layer over the write gap and at least partially over the zero throat insulation layer.
36. The method of claim 30 wherein forming the cover insulation layer includes sputtering Al 2 O 3 to a thickness of less than 1.0 μm.
37. The method of claim 30 wherein forming the anti-reflective coating layer includes depositing a silicon nitride compound.
38. The method of claim 37 wherein depositing the silicon nitride compound includes depositing SiNx.
39. The method of claim 37 wherein depositing the silicon nitride compound includes depositing SiONx.
40. The method of claim 30 wherein forming the anti-reflective coating layer includes depositing the anti-reflective coating to a thickness of about 80 Å to about 200 Å.
41. The method of claim 30 wherein forming the anti-reflective coating layer includes depositing the anti-reflective coating to a thickness of about 160 Å.