Actuator with reduced drive capacitance
View Patent ↗Techniques are provided for reducing the amount of power required to activate a piezoelectric actuator of a microelectromechanical structure. An insulating layer is deposited on a piezoelectric layer. The insulating layer is etched to remove a portion of the layer and expose the piezoelectric layer in the etched areas. An electrode layer is deposited on the piezoelectric layer and insulating layer.
1. An actuator, comprising:
a membrane;
a first electrode having a first portion and a second portion;
a piezoelectric layer having a first surface adjacent to the membrane and a second surface adjacent to the first electrode, the first surface being opposite to the second surface; and
an insulating layer disposed between the piezoelectric layer and the first electrode;
wherein the first portion of the first electrode contacts the insulating layer and the second portion of the first electrode contacts the piezoelectric layer.
2. The actuator of claim 1 , wherein the insulating layer includes an oxide material.
3. The actuator of claim 1 , wherein the first electrode is electrically connected to an integrated circuit.
4. The actuator of claim 1 , wherein the insulating layer is between about 0.1 and about 5 microns thick.
5. The actuator of claim 4 , wherein the insulating layer is between about 0.5 and about 2 microns thick.
6. The actuator of claim 1 , further comprising a second electrode, wherein the piezoelectric layer is disposed between the first electrode and the second electrode.
7. A method for forming the actuator of claim 1 , comprising:
depositing the layer of insulating material on the first surface of the piezoelectric layer;
patterning the layer of insulating material so that the insulating material is located over the first portion of the piezoelectric layer;
forming the first electrode so that the first electrode contacts the insulating material and the first surface of the piezoelectric layer over a second portion of the piezoelectric layer, and
bonding the piezoelectric layer to the membrane causing the piezoelectric layer to be between the membrane and the insulating layer.
8. The method of claim 7 , wherein depositing the layer of insulating material includes depositing a layer of insulating material on a piezoelectric layer having a second electrode on a second surface.
9. The method of claim 7 , wherein depositing the layer of insulating material occurs prior to forming the first electrode.
10. The method of claim 7 , wherein depositing the layer of insulating material includes depositing a layer of oxide material.
11. The method of claim 7 , wherein the membrane comprises silicon.
12. A printhead structure, comprising:
a substrate having a pumping chamber formed adjacent to an upper surface of the substrate and a nozzle, wherein the pumping chamber is in fluidic communication with the nozzle; and
an actuator comprising:
a membrane:
a first electrode having a first portion and a second portion;
a piezoelectric layer having a first surface adjacent to the membrane and a second surface adjacent to the first electrode, the first surface being opposite to the second surface; and
an insulating layer disposed between the piezoelectric layer and the first electrode;
wherein the first portion of the first electrode contacts the insulating layer and the second portion of the first electrode contacts the piezoelectric layer;
wherein the actuator is connected to the upper surface of the substrate.
13. The printhead structure of claim 12 , wherein the second portion of the first electrode substantially overlies the pumping chamber.
14. The printhead structure of claim 13 , further comprising an integrated circuit electrically coupled to the first electrode.
15. The printhead structure of claim 13 , wherein the insulating layer includes an oxide material.
16. The printhead structure of claim 13 , wherein:
the first electrode has a thickness equal to or less than about two microns; and
the insulating layer has a thickness of between about 0.1 and 5 microns.
17. The printhead structure of claim 13 , further comprising a second electrode, wherein the piezoelectric layer is disposed between the first and second electrodes.
18. A method of forming the printhead structure of claim 12 , comprising:
depositing the layer of insulating material on the first surface of the piezoelectric layer;
patterning the layer of insulating material so that the insulating material is located over a first portion of the piezoelectric layer;
forming the first electrode so that the first electrode contacts the insulating material and the first surface of the piezoelectric layer over a second portion of the piezoelectric layer; and
bonding the piezoelectric layer to the upper surface of the substrate.
19. The method of claim 18 , wherein the substrate includes an ink flow path.
20. The method of claim 18 , wherein:
patterning the insulating layer removes a portion of the insulating layer that is located over at least a portion of the pumping chamber.
21. The method of claim 20 , wherein depositing a layer of insulating material includes depositing a layer of oxide that is between about 0.5 microns to about 2 microns thick.
22. The method of claim 21 , further comprising electrically connecting an integrated circuit to the first electrode.
23. The method of claim 18 , wherein bonding the piezoelectric layer to an upper surface of the substrate includes bonding the piezoelectric layer to the substrate so that a second electrode is between the piezoelectric layer and the substrate.