Method for depositing a polymeric coating on a substrate
View Patent ↗The present application relates to a method for vapor depositing a polymeric coating onto a substrate. In an embodiment, the invention is a method for applying a polymer coating to a substrate comprising performing a bake-out cycle with a chemical vapor deposition system and performing a deposition cycle with the chemical vapor deposition system.
1. A method for applying a polymer coating to a substrate comprising:
performing a bake-out cycle with a multi-chambered chemical vapor deposition system, the multi-chambered chemical vapor deposition system comprising a vaporization chamber, a cracking chamber, and a deposition chamber, the bake-out cycle comprising heating the vaporization and/or cracking chamber to a temperature adequate to vaporize any residual contaminants while maintaining the deposition chamber at a temperature of less than 80 degrees Celsius, and removing the contaminants, and
performing a deposition cycle with the chemical vapor deposition system, the deposition cycle comprising depositing a polymer onto the substrate.
2. The method of claim 1 , wherein performing the bake-out cycle comprises heating the cracking chamber to at least 600 degrees Celsius.
3. The method of claim 1 , wherein performing the bake-out cycle comprises heating the vaporization chamber to at least 80 degrees Celsius.
4. The method of claim 2 , wherein performing the bake-out cycle comprises cooling the cracking chamber to at least 300 degrees Celsius.
5. The method of claim 1 , wherein performing the deposition cycle comprises adding a charge of a polymer dimer to the vaporization chamber.
6. The method of claim 1 , wherein performing the deposition cycle comprises heating the cracking chamber to at least 600 degrees Celsius.
7. The method of claim 1 , wherein performing the deposition cycle comprises heating the vaporization chamber to at least 80 degrees Celsius.
8. The method of claim 1 , wherein performing the deposition cycle comprises condensing a monomer vapor onto the substrate.
9. The method of claim 1 , the substrate comprising stainless steel.
10. The method of claim 1 , wherein performing the deposition cycle further comprises cooling the cracking chamber to at least 300 degrees Celsius.
11. The method of claim 1 , the polymer comprising at least one of poly 2-chloro-paraxylylene (parylene C), polyparaxylylene (parylene N), poly 2,5-dichloro-paraxylylene (parylene D).
12. The method of claim 1 , the polymer comprising poly 2-chloro-paraxylylene (parylene C).
13. The method of claim 1 , wherein the step of performing a deposition cycle with a chemical vapor deposition system is performed after the step of performing a bake-out cycle with the chemical vapor deposition system.
14. The method of claim 1 , wherein the step of performing a bake-out cycle with the chemical vapor deposition system is performed after the step of performing a deposition cycle with a chemical vapor deposition system.
15. The method of claim 1 , wherein the step of performing a deposition cycle is alternated with the step of performing a bake-out cycle.
16. The method of claim 1 , the substrate comprising a medical device.
17. The method of claim 16 , the medical device comprising a stent.
18. A method of using a chemical vapor deposition system to coat a substrate with a polymer, comprising performing a coating cycle and performing a cleaning cycle, the cleaning cycle comprising heating a vaporization and/or cracking chamber of the chemical vapor deposition system while keeping a deposition chamber of the chemical vapor deposition system at a temperature of less than 80 degrees Celsius, the coating cycle comprising condensing a monomer vapor onto the substrate and opening the system, wherein the system is opened prior to initiating the cleaning cycle.
19. The method of claim 18 , wherein the cleaning cycle comprises removing non-reactive monomer from the chemical vapor deposition system.
20. The method of claim 18 , the polymer comprising parylene.
21. The method of claim 18 , wherein the coating cycle comprises heating the cracking chamber to at least 600 degrees Celsius.
22. The method of claim 18 , wherein the coating cycle comprises heating a vaporization chamber to at least 80 degrees Celsius.
23. The method of claim 18 , the monomer vapor comprising monomeric diradicals of parylene.
24. The method of claim 18 , the substrate comprising stainless steel.
25. The method of claim 18 , wherein the coating cycle comprises cooling the cracking chamber to less than 300 degrees Celsius.
26. The method of claim 18 , wherein the cleaning cycle comprises heating the cracking chamber to at least 600 degrees Celsius.
27. The method of claim 18 , wherein the cleaning cycle comprises heating the vaporization chamber to at least 80 degrees Celsius.
28. The method of claim 18 , wherein the cleaning cycle comprises cooling the cracking chamber to less than 300 degrees Celsius.
29. The method of claim 18 , wherein the cleaning cycle is performed after the coating cycle.
30. The method of claim 18 , wherein the coating cycle is performed after the cleaning cycle.
31. The method of claim 18 , wherein a cleaning cycle follows every coating cycle.