IP Library Granted Patent US 7,177,058
Granted Patent B2
US 7,177,058 · App. 10/915,497 · Granted Feb 13, 2007

Beam deflection device

Assignee: Leica Microsystems CMS GmbH
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Quick Facts
Patent No.
US 7,177,058
App. No.
10/915,497
Granted
Feb 13, 2007
Kind
B2
Abstract

A deflection means which is rotatably and/or pivotably mounted in a bearing which comprises a Ferrofluid. The deflection means is part of an adjustable beam deflection device for deflecting a light beam. The deflection means is rotatable and/or pivotable about several axes.

Claims (19)

1. An adjustable beam deflection device for deflecting a light beam comprising:

a deflection means which is rotatable and/or pivotable about several axes, and

a ferrofluid disposed inside a yoke of an annular magnet, wherein the deflection means is disposed on a nonmagnetic support, at least a portion of the nonmagnetic support floating in the ferrofluid.

2. The beam deflection device as defined in claim 1 , wherein the deflection means is rotatable and/or pivotable about two axes in a kind of ball bearing.

3. The beam deflection device as defined in claim 1 , wherein the deflection means at least partially reflects the light beam.

4. The beam deflection device as defined in claim 1 , wherein the deflection means deflects the light beam by refraction.

5. The beam deflection device as defined in claim 1 , wherein the deflection means comprises a mirror and/or an optical grating and/or a prism and/or an at least partially reflective coating.

6. The beam deflection device as defined in claim 1 , whereby the beam deflection device is used in a scanning microscope.

7. The beam deflection device as defined in claim 1 , wherein the ferrofluid is configured to automatically center the deflection means.

8. The beam deflection device as defined in claim 1 , wherein the deflection means comprises a control lever with which the rotational position of the deflection means is adjustable.

9. The beam deflection device as defined in claim 1 , further comprising at least one drive means for rotating and/or pivoting the deflection means.

10. The beam deflection device as defined in claim 9 , wherein the drive means acts on a control lever.

11. The beam deflection device as defined in claim 10 , wherein the drive means operates electromagnetically and/or electrostatically.

12. The beam deflection device as defined in claim 10 , wherein the drive means comprises a coil and/or an electromagnet.

13. The beam deflection device as defined in claim 1 , further comprising a monitoring means for identifying the current rotational position of the deflection means.

14. The beam deflection device as defined in claim 13 , wherein the monitoring means ascertains the rotational position from the deflection direction of the light beam deflected by the deflection means, and/or from the deflection direction of a monitoring light beam deflected by the deflection means.

15. A scanning microscope comprising an adjustable beam deflection device for deflecting a light beam, the beam deflection device comprising a deflection means rotatable and/or pivotable about several axes and a ferrofluid disposed inside a yoke of an annular magnet, wherein the deflection means is disposed on a nonmagnetic support, at least a portion of the nonmagnetic support floating in the ferrofluid.

16. The scanning microscope as defined in claim 15 , wherein the deflection means is rotatable and/or pivotable about two axes in a kind of ball bearing.

17. The scanning microscope as defined in claim 15 further comprising: a drive means for rotating and/or pivoting the deflection means.

Assignments (2)
CHANGE OF NAME Recorded Jul 27, 2006
From: LEICA MICROSYSTEMS HEIDELBERG GMBH
To: LEICA MICROSYSTEMS CMS GMBH
Reel/Frame 017996/0809 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Aug 10, 2004
From: RYGIEL, REINER
To: LEICA MICROSYSTEMS HEIDELBERG GMBH
Reel/Frame 015675/0608 →
Priority Claims (1)
DE 103 37 297 · Aug 14, 2003 · national
Continuity (1)
Related Publication 20050036186A1 · Feb 17, 2005