IP Library Granted Patent US 7,513,141
Granted Patent B2
US 7,513,141 · App. 10/916,261 · Granted Apr 7, 2009

Method for differentially pumping endblock seal cavity

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Quick Facts
Patent No.
US 7,513,141
App. No.
10/916,261
Granted
Apr 7, 2009
Kind
B2
Abstract

A system for providing a seal between a rotating part and a stationary part that comprises two seals in series separated by a cavity is disclosed. The cavity may be at low pressure and failure of either seal may be detected by a change in cavity pressure. An alarm may be triggered when cavity pressure rises above a threshold, or when it remains above a threshold for more than a predetermined period of time. In a system comprising multiple cavities, a cavity may be selectively isolated to determine if a seal associated with that cavity is experiencing a leak.

Claims (25)

1. An apparatus sufficient to maintain subatmospheric pressure in a chamber comprising rotatable parts mechanically coupled to an exterior of the chamber, the apparatus comprising:

a static chamber portion;

a rotatable chamber portion;

a gap, a first seal and a second seal located between the static chamber portion and the rotatable chamber portion;

a cavity located between the first seal and the second seal; and

a monitoring device sufficient to monitor pressure of the cavity and to signal when pressure in the cavity exceeds a predetermined pressure for a predetermined period.

2. An apparatus sufficient to maintain subatmospheric pressure in a chamber comprising rotatable parts mechanically coupled to an exterior of the chamber, the apparatus comprising:

a static chamber portion;

a rotatable chamber portion;

a gap, a first seal and a second seal located between the static chamber portion and the rotatable chamber portion;

a cavity located between the first seal and the second seal;

a monitoring device sufficient to monitor pressure of the cavity and to signal when pressure in the cavity exceeds a predetermined pressure; and

a flow-restricting device connecting a volume at a first reduced pressure to the cavity and sufficient to create a second reduced pressure in the cavity, the second reduced pressure being higher than the first reduced pressure.

3. An apparatus sufficient to maintain subatmospheric pressure in a chamber comprising rotatable parts mechanically coupled to an exterior of the chamber, the apparatus comprising:

a static chamber portion;

a rotatable chamber portion;

a gap, a first seal and a second seal located between the static chamber portion and the rotatable chamber portion;

a cavity located between the first seal and the second seal;

a monitoring device sufficient to monitor pressure of the cavity and to signal when pressure in the cavity exceeds a predetermined pressure; and

a pressure gauge sufficient to communicate pressure in the cavity to the monitoring device.

4. The apparatus of any of claims 1 and 2 , further comprising a pressure gauge sufficient to communicate pressure in the cavity to the monitoring device.

5. The apparatus of any of claims 1 and 3 , wherein the monitoring device is sufficient to signal when pressure in the cavity exceeds a predetermined pressure for a predetermined period.

6. The apparatus of any of claims 2 and 3 , further comprising a flow-restricting device connecting a volume at a first reduced pressure to the cavity and sufficient to create a second reduced pressure in the cavity, the second reduced pressure being higher than the first reduced pressure.

7. The apparatus of any of claims 1 - 3 , further comprising a pressure gauge sufficient to measure pressure in the cavity.

8. The apparatus of any of claims 1 - 3 , further comprising at least one other cavity in communication with the cavity via a conduit, wherein the monitoring device is sufficient to monitor pressure in the conduit.

Assignments (6)
CORRECTIVE ASSIGNMENT TO CORRECT THE NATURE OF CONVEYANCE SHOULD READ "LICENSE" PREVIOUSLY RECORDED ON REEL 017507 FRAME 0246. ASSIGNOR(S) HEREBY CONFIRMS THE NATURE OF CONVEYANCE CURRENTLY READS "MERGER". Recorded Feb 24, 2010
From: VON ARDENNE ANALAGENTECHNIK GMBH
To: VON ARDENNE ANLAGENTECHNIK GMBH
Reel/Frame 023985/0091 →
MERGER Recorded Apr 21, 2006
From: COATING INDUSTRIES INVESTMENT CORP.
To: APPLIED FILMS CORPORATION
Reel/Frame 017507/0246 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Mar 18, 2005
From: VON ARDENNE ANLAGENTECHNIK GMBH
To: COATING INDUSTRIES INVESTMENT CORP.
Reel/Frame 016386/0711 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Jan 20, 2005
From: RIETZEL, JAMES G.
To: VON ARDENNE ANLAGENTECHNIK GMBH
Reel/Frame 015611/0150 →
NON-EXCLUSIVE LICENSE AGREEMENT *UNNECESSARY PORTI Recorded Nov 8, 2004
From: VON ARDENNE ANLAGENTECHNIK GMBH
To: COATING INDUSTRIES INVESTMENT CORP.
Reel/Frame 015348/0270 →
EXCLUSIVE LICENSE AGREEMENT Recorded Nov 3, 2004
From: VON ARDENNE ANLAGENTECHNIK GMBH
To: COATING INDUSTRIES INVESTMENT CORP.
Reel/Frame 015334/0545 →