Method of manufacturing a semiconductor light-emitting device
View Patent ↗A semiconductor light-emitting device exhibits high reflectance even with less number of pairs of light-reflecting layers, and allows light emitted from the active layer to be effectively extracted outside. This semiconductor light-emitting device is fabricated at good mass productivity by a semiconductor light-emitting device manufacturing method including the step of providing an active layer which generates light having a specified wavelength on a semiconductor substrate. On the semiconductor substrate, are stacked an Al x Ga 1-x As layer and the active layer, in this order. Part of the Al x Ga 1-x As layer with respect to the is changed into an AlO y layer (where y is a positive real number).
1. A method for manufacturing a semiconductor light-emitting device by stacking, on a semiconductor substrate, a plurality of layers including an active layer made of a semiconductor which generates light of a specified wavelength, the method comprising the steps of:
providing, between the semiconductor substrate and the active layer, an Al rich layer higher in Al ratio than any other layer among the plurality of layers;
dividing into chips a wafer in which the plurality of layers are stacked, thereby making a side face of the Al rich layer exposed; and
oxidizing Al contained in the Al rich layer from the exposed side face, thereby making a peripheral portion of the Al rich layer changed into an AlO y layer.
2. The method for manufacturing a semiconductor light-emitting device according to claim 1 , wherein
the step of oxidizing Al contained in the Al rich layer is carried out by leaving in a water vapor the chips in which the side face of the Al rich layer is exposed.
3. The method for manufacturing a semiconductor light-emitting device according to claim 2 , wherein
the water vapor is introduced to the side face of the Al rich layer by an inert gas that has been passed through boiling water.
4. The method for manufacturing a semiconductor light-emitting device according to claim 2 , wherein
the step of oxidizing Al contained in the Al rich layer is carried out in an atmosphere having a temperature of 300° C. to 400° C.
5. The method for manufacturing a semiconductor light-emitting device according to claim 1 , further comprising the step of:
removing, by etching, the AlO y layer formed at the peripheral portion of the Al rich layer.