Fabrication method of semiconductor device
View Patent ↗The present invention provides a technology capable of shortening a TAT of a microcomputer with a nonvolatile memory built therein and achieving a reduction in cost. Flash ROMs comprising memory cells each substantially identical in structure to each of memory cells of a flash memory are formed in their corresponding chips lying in a wafer. Subsequently, memory information is written into each of the memory cells of the flash ROM in a probe test process. Thereafter, the memory information written into the memory cell thereof is made unreprogrammable to thereby disable rewriting of the post-shipment memory information. Thus, the shortening of a TAT can be achieved as compared with a mask ROM built-in microcomputer, and management and fabrication costs can be reduced.
1. A method of fabricating a semiconductor device, comprising the steps of:
(a) forming a logic circuit and an electrically reprogrammable ROM circuit each having substantially the same structure in each of first and second chip areas on a wafer;
(b) discretely or simultaneously executing a first electrical operation test on the first and second chip areas
(c) after said step (b), respectively electrically writing first and second ROM pattern data corresponding to first and second user's uses into the ROM circuits in the first and second chip areas respectively, as a step prior to or below the first electrical operation test;
(d) dividing the wafer into the first and second chip areas after said step (c); and
(e) executing a second electrical operation test on the divided first and second chip areas respectively.
2. The method according to claim 1 , wherein prior to said step (d), the first and second ROM pattern data are made unerasable or unreprogrammable according to an electrical signal operation normally open to a user.
3. The method according to claim 1 , wherein the first and second ROM pattern data are identical to each other.
4. The method according to claim 1 , wherein the first and second ROM pattern data are different from each other.
5. The method according to claim 1 , wherein the electrically reprogrammable ROM circuit has a structure corresponding to a flash memory circuit.
6. The method according to claim 1 , wherein the electrically reprogrammable ROM circuit has a structure corresponding to a ferroelectric RAM circuit.
7. The method according to claim 1 , wherein the electrically reprogrammable ROM circuit has a structure corresponding to an MRAM circuit.
8. The method according to claim 1 , wherein a retention test is unexecuted on the electrically reprogrammable ROM circuit before at least said step (d).
9. The method according to claim 1 , further including a step of:
(f) executing a retention test on the electrically reprogrammable ROM circuit as a step prior to said step (d) and after said step (c) or therebelow.