Apparatus and method for correction of aberrations in laser system optics

1. A laser beam energy correction method for correcting fluence distribution of the laser beam over a predetermined scan pattern for a target, said correction method comprising the steps of:

determining the fluence distribution of the laser beam energy over a focal plane within the target, wherein said determining the fluence distribution comprises the steps of:

focusing the laser beam through an optic to the focal plane;

pulsing said laser beam through the optic onto the focal plane;

measuring the fluence distribution over the focal plane; and

storing the fluence distribution of the focal plane into a computer memory; and

calibrating the laser beam by modifying the laser beam energy for the predetermined scan pattern based upon the fluence distribution.

2. The method of claim 1 , further comprising repeating the focusing, pulsing, measuring and storing steps.

3. The method of claim 1 , wherein fluence sensitive material is positioned within the focal plane.

4. The method of claim 1 , wherein measuring fluence distribution comprises capturing a signal with a photodetector.

5. The method of claim 4 , wherein the signal comprises plasma light.

6. The method of claim 1 , wherein measuring fluence distribution comprises measuring the fluence at a plurality of coordinate points on the focal plane.

7. The method of clam 6 , wherein the plurality of coordinate points comprises at least 1000 points.

8. The method of claim 1 , wherein the pulsing comprises a constant energy.

9. The method of claim 1 , wherein the pulsing comprises at least about 1,000 pulses per second.

10. The method of claim 1 , wherein calibrating the laser beam energy for the predetermined pattern comprises retrieving the stored fluence distribution over the focal plane from the computer memory and modifying the laser beam energy at individual points in the predetermined pattern.

11. The method of claim 10 , wherein calibrating comprises comparing the stored fluence distribution at points in the predetermined pattern with reference values.

12. The method of claim 1 , wherein calibrating the laser beam energy for the predetermined pattern comprises minimizing the fluence variance over the predetermined pattern.

13. The method of claim 1 , wherein the focal plane comprises a substantially flat surface.

14. The method of claim 1 , wherein predetermined pattern comprises a spiral.

15. A laser beam energy correction method for correcting fluence distribution of the laser beam over a predetermined scan pattern for a target, said correction method comprising the steps of:

determining the fluence distribution of the laser beam energy over a focal plane within the target;

calibrating the laser beam by modifying the laser beam energy for the predetermined scan pattern based upon the fluence distribution by controlling the energy output of the laser beam through a feedback control mechanism.

16. A laser beam energy correction method for correcting fluence distribution of the laser beam over a predetermined pattern on an object, said correction method comprising the steps of:

calibrating the laser beam energy over the predetermined pattern;

focusing the laser beam on the object; and

pulsing the adjusted laser beam over the predetermined pattern on the object;

wherein calibrating the laser beam energy over the predetermined pattern comprises retrieving a stored fluence distribution over the predetermined pattern from a computer memory and modifying the laser beam energy at individual points in the predetermined pattern.

17. The method of claim 16 , wherein calibrating the laser beam energy over the predetermined pattern comprises controlling the energy output of the laser beam through a feedback control mechanism.

18. The method of claim 16 , wherein said calibrating comprises the steps of:

focusing the laser beam through an optic to a focal plane;

pulsing said laser beam through the optic onto the focal plane; and

measuring the fluence distribution over the focal plane;

storing the fluence distribution of the focal plane into the computer memory.

19. The method of claim 18 , further comprising repeating the focusing, pulsing, measuring and storing steps.

20. The method of claim 18 , wherein fluence sensitive material is positioned within the focal plane.

21. The method of claim 18 , wherein measuring fluence distribution comprises capturing a signal with a photodetector.

22. The method of claim 21 , wherein the signal comprises plasma light.

23. The method of claim 18 , wherein measuring fluence distribution comprises measuring the fluence at a plurality of coordinate points on the focal plane.

24. The method of claim 23 , wherein the plurality of coordinate points comprises at least 1000 points.

25. The method of claim 18 , wherein the pulsing comprises a constant energy.

26. The method of claim 18 , wherein the pulsing comprises at least about 10,000 pulses per second.

27. The method of claim 18 , wherein calibrating the laser beam energy over the predetermined pattern comprises minimizing the fluence variance over the predetermined pattern.

28. The method of claim 18 , wherein the focal plane comprises a substantially flat surface.

29. The method of claim 18 , wherein the optic comprises a glass lens or a medical grade plastic lens.

30. The method of claim 18 , wherein the focal plane is a threshold fluence plate.

31. A method of compensating for aberrations in laser system optics, the method comprising:

directing a plurality of laser beam pulses from a laser to a plurality of focal spots in a sample according to a predetermined pattern, each pulse of the pattern being directed to a different focal spot and the pulses of the pattern having a pulse energy which is constant among the pulses;

measuring a fluence distribution across the predetermined pattern;

determining a fluence variance across the predetermined pattern based on the fluence distribution; and

calibrating the laser to emit laser beam pulses having varying pulse energies to reduce the fluence variance.

32. The method of claim 31 , wherein measuring the fluence distribution includes detecting plasma light resulting from photodisruption at each focal spot within the sample.

33. The method of claim 31 , wherein calibrating the laser includes calibrating the laser to emit laser beam pulses having varying pulse energies which minimize the fluence variance.

34. The method of claim 31 , wherein calibrating the laser includes controlling the pulse energies through a feedback control mechanism.

35. The method of claim 31 , wherein the predetermined pattern is non-planar.

36. The method of claim 31 , wherein the predetermined pattern comprises a spiral pattern.