Transparent metal shielded isolation for image sensors
View Patent ↗An isolation region formed in a substrate and lined with a transparent metal layer. The isolation region provides isolation between adjacent active areas of an integrated circuit structure, for example the inventive region may provide isolation between pixels of a pixel array. Utilizing a transparent material maintains high quantum efficiency of the pixels as photons are not blocked from penetrating into the substrate. In one exemplary embodiment, a shallow trench isolation region is formed in a substrate, lined with an oxide or other dielectric, and an indium-tin-oxide shielding layer is formed over the oxide. The lined trench may then be filled with either the transparent metal material or a transparent insulating material.
1. An isolation structure comprising:
a trench region having sidewalls and a bottom formed in a semiconductor substrate;
a dielectric layer lining at least the sidewalls of said trench region; and
a transparent conductive layer over said dielectric layer, wherein said transparent conductive layer comprises indium tin oxide and has a thickness of about 200 to about 300 Angstroms.
2. The isolation structure of claim 1 , wherein said dielectric layer lines the sidewalls and the bottom of the trench region.
3. The isolation structure of claim 1 , wherein said dielectric layer comprises an oxide.
4. The isolation structure of claim 1 , wherein said dielectric layer comprises silicon dioxide.
5. The isolation structure of claim 1 , wherein said transparent conductive layer fills said trench region.
6. An imager pixel comprising:
a photosensitive element formed in a substrate; and
an isolation region formed in the substrate and adjacent said photosensitive element, said isolation region comprising:
a trench formed in the substrate;
a dielectric layer lining said trench; and
a transparent conductive layer over the dielectric layer, wherein said transparent conductive layer has a thickness of about 200 to about 300 Angstroms.
7. The pixel of claim 6 , further comprising a terminal formed over the substrate adapted to apply a voltage to said transparent conductive layer.
8. The pixel of claim 6 , wherein said dielectric layer comprises an oxide.
9. The pixel of claim 8 , wherein said dielectric layer has a thickness of about 100 to about 1000 Angstroms.
10. The pixel of claim 6 , wherein said dielectric layer comprises silicon dioxide.
11. The pixel of claim 6 , further comprising an oxide over the transparent conductive layer to fill said trench.
12. The pixel of claim 6 , wherein said transparent conductive layer comprises indium tin oxide.
13. The pixel of claim 6 , wherein said transparent conductive layer fills said trench region.
14. An array of pixels comprising:
a plurality of pixel active areas formed in a substrate; and
a plurality of isolation regions formed in the substrate and adjacent the active areas, each isolation region comprising:
an oxide layer formed in a trench; and
a layer of transparent conductive material having a thickness of about 200 to about 300 Angstroms located over said oxide layer.
15. The array of claim 14 , wherein said oxide layer comprises any one of silicon dioxide and oxy-nitride.
16. The array of claim 15 , wherein said oxide layer has a thickness of about 100 to about 1000 Angstroms.
17. The array of claim 14 , further comprising a layer of dielectric material over said transparent conductive layer.
18. The array of claim 14 , wherein said transparent conductive layer comprises one of indium oxide, tin oxide, and indium tin oxide.
19. An array of pixels comprising:
a plurality of imager pixels formed in a substrate, wherein at least one of said pixel sensor cells comprises:
a photosensitive element for converting photons into electrons; and
an isolation trench adjacent said photosensitive element, said isolation trench comprising a transparent metal layer having a thickness of about 200 to about 300 Angstroms and an oxide layer lining sidewalls and a bottom of said isolation trench, wherein said oxide layer is formed beneath said transparent metal layer.
20. The array of claim 19 , wherein said transparent metal layer fills said lined trench.
21. The array of claim 19 , wherein said transparent metal layer comprises indium tin oxide.
22. A processing system comprising:
a processor; and
an imaging device comprising an array of pixels formed in a substrate, wherein a plurality of pixels of said array comprise:
a photosensitive element; and
an isolation trench located adjacent said photosensitive element in the substrate and having sidewalls and a bottom, said isolation trench comprising a dielectric material lining the sidewalls and the bottom of the trench, and a transparent conductive layer having a thickness of about 200 to about 300 Angstroms and being located over said dielectric lining and at least one of the sidewalls and the bottom of the trench.
23. The processing system of claim 22 , wherein said imager is a CMOS imager and said pixels are CMOS pixel cells.
24. The processing system of claim 22 , wherein said dielectric layer comprises silicon dioxide.
25. The processing system of claim 22 , wherein said transparent conductive layer comprises indium tin oxide.
26. A pixel imager cell comprising:
at least one active area formed in a substrate;
at least one isolation region formed in the substrate and adjacent the at least one active area, each isolation region comprising:
a trench having sidewalls and a bottom;
an oxide layer formed on the sidewalls and bottom of said trench; and
a layer of indium tin oxide formed over said oxide layer, said indium tin oxide having a thickness of about 200 to about 300 Angstroms; and
a terminal contact connected to said layer of indium tin oxide for applying a voltage potential to said isolation region.