Array substrate for liquid crystal display device and manufacturing method thereof
View Patent ↗An array substrate for a liquid crystal display device includes a substrate, a gate line and a data line on the substrate, the gate line and the data line crossing each other to define a pixel area, a thin film transistor electrically connected to the gate and data line and includes a gate electrode, an active layer, a source electrode, and a drain electrode, a passivation layer covering the gate line, the data line, and the thin film transistor, and having a contact hole situated on the active layer to expose portions of the drain electrode and the active layer, and a pixel electrode on the passivation layer and connected to the drain electrode through the contact hole.
1. A manufacturing method of an array substrate for a liquid crystal display device, comprising:
forming a gate line and a gate electrode on a substrate through a first mask process;
forming a gate insulating layer, an amorphous silicon layer, a doped amorphous silicon layer, and a metal layer on the gate line and the gate electrode;
forming a photoresist layer on the metal layer;
forming a photoresist pattern by exposing and developing the photoresist layer through a second mask process, the photoresist layer having a first thickness and a second thickness thinner than the first thickness;
patterning the metal layer, the doped amorphous silicon layer, and the amorphous silicon layer exposed by the photoresist pattern to form a source and drain pattern, a data line, a doped amorphous silicon pattern, and an active layer;
removing the second thickness of the photoresist pattern through an ashing process to expose the source and drain pattern;
patterning the source and drain pattern and the doped amorphous silicon pattern exposed by the photoresist pattern to form a source electrode, a drain electrode, and an ohmic contact layer;
forming a passivation layer on the source and drain electrodes;
patterning the passivation layer through a third mask process to form a contact hole situated on the active layer and exposing the drain electrode and the active layer; and
forming a pixel electrode on the passivation layer through a fourth mask process, the pixel electrode connected to the drain electrode through the contact hole.
2. The method according to claim 1 , wherein a mask is used in the second mask process and includes a transmitting portion, a blocking portion, and a half transmitting portion.
3. The method according to claim 2 , wherein the first thickness of the photoresist pattern corresponds to the blocking portion of the mask and the second thickness of the photoresist pattern corresponds to the half transmitting portion.
4. The method according to claim 1 , wherein the active layer has the same shape as the data line, the source electrode, and the drain electrode except for a first portion between the source and drain electrodes and a second portion corresponding to the contact hole.
5. The method according to claim 1 , wherein the source electrode has a “U” shape and surrounds the drain electrode.
6. The method according to claim 1 , wherein the contact hole exposes a sidewall of the drain electrode.
7. The method according to claim 1 , wherein the active layer includes amorphous silicon.
8. The method according to claim 1 , wherein the ohmic contact layer has the same shape as the data line, the source electrode, and the drain electrode.
9. The method according to claim 8 , wherein the ohmic contact layer includes doped amorphous silicon layer.