Anodic oxidation apparatus
View Patent ↗In an anodic oxidation apparatus and an anodic oxidation method and a panel for a display device manufactured by them, a large target substrate is treated by a smaller component. The anodic oxidation apparatus includes a lamp which emits light; a treatment bath which has a stage capable of mounting a target substrate thereon with a treatment part thereof directed upward and is provided at a position where the emitted light reaches and a frame located on the stage; a cathode electrode which is provided on the way of the emitted light to reach the mounted target substrate and includes an opening to allow the light to pass therethrough; a seal member which establishes a liquid sealing property between the frame and the mounted target substrate; a conductive contact member which is provided to be contactable with a plurality of electrode patterns formed on the target substrate outside an annular shape of the seal member and moves along side of the target substrate; and a current source which is electrically connected to the contact member and sets an output current value in accordance with the number of electrode patterns of the mounted target substrate in contact as the contact member moves.
1. An anodic oxidation apparatus, comprising:
a lamp which emits light;
a treatment bath which has a stage capable of mounting a target substrate thereon with a treatment part thereof directed upward and provided at a position where the emitted light reaches and a frame located on the stage;
a cathode electrode which is provided on the way of the emitted light to reach the mounted target substrate and includes an opening to allow the light to pass therethrough;
a seal member which establishes a liquid sealing property between the frame and the mounted target substrate;
a conductive contact member which is provided to be contactable with a plurality of electrode patterns formed substantially in parallel on the target substrate outside an annular shape of said seal member and moves perpendicular to the electrode patterns along side of the mounted target substrate continuously, the conductive contact member having a longer length to contact with the electrode patterns in a direction of movement than an interval of the electrode patterns; and
a current source which is electrically connected to said contact member and sets an output current value in accordance with the number of electrode patterns of the mounted target substrate in contact as said contact member moves.
2. The anodic oxidation apparatus as set forth in claim 1 , wherein the length of said contact member to be provided for contact with the electrode patterns of the target substrate in the direction of the movement thereof ranges from 10 mm to 200 mm.
3. The anodic oxidation apparatus as set forth in claim 1 , wherein said contact member moves while in contact with the electrode patterns of the target substrate by sliding thereon.
4. The anodic oxidation apparatus as set forth in claim 1 , wherein said contact member moves while in contact with the electrode patterns of the target substrate by rolling thereon.
5. The anodic oxidation apparatus as set forth in claim 1 , further comprising:
a moving/scanning part which moves said lamp and said cathode electrode in synchronism with the movement of said contact member.
6. The anodic oxidation apparatus as set forth in claim 1 , wherein said current source outputs electric current proportional to the number of electrode patterns of the target substrate which are in contact with said contact member.
7. The anodic oxidation apparatus as set forth in claim 1 , further comprising:
a contact member moving/scanning part which moves said contact member at a fixed speed.