Composition and method for removing copper-compatible resist

1. A method for removing a copper-compatible resist, comprising combining about 10 to 30% by weight of an alkanol amine solvent, combining about 10 to 80% by weight of a glycol group solvent, combining about 9.5 to 80% by weight of a polar solvent, and combining about 0.5 to 10% by weight of a corrosion inhibitor,

wherein the the alkanol amine solvent is selected from at least one of an alkyl group consisting of N-methylethanolamine, N-ethylethanolamine, diethylethanolamine and dimethylethanolamine, and

wherein the corrosion inhibitor is selected from an mercapto group consisting of mercaptobenzodiazole, mercaptoethanol, mercaptopropanediol, dimethylthiophenol, propylthiophenol, methoxythiophenol, methylthiophenol, thioanisole, tert-butylthiophenol, tert-buthyl-2-methylthiophenol, mercaptomethylimidazole, and mercaptomethylbenzimidazole.

2. The method according to claim 1 , wherein the glycol group solvent has a boiling point higher than about 180° C.

3. The method according to claim 1 , wherein the glycol group solvent is selected from one of glycolic solvent and glycol ethers solvent.

4. The method according to claim 2 , wherein the glycol group solvent is selected from at least one of the group consisting of ethyleneglycol-methylether, ethyleneglycol-ethylether, ethyleneglycol-buthylether, diethyleneglycol-methylether, diethyleneglycol-ethylether, diethyleneglycol-propylether, diethyleneglycol-butylether, ethyleneglycol, diethyleneglycol, tri-ethyleneglycol, and tetra-etyleneglycol.

5. The method according to claim 1 , wherein the polar solvent is selected from at least one of the group consisting of N-methyl-2-pyrrolidone, N,N-dimethylacetamide, N,N-dimethylformamide, and N,N-dimethylimidazol.