Semiconductor device and a method of manufacturing the same
View Patent ↗A semiconductor device and method having high output and having reduced external resistance is reduced and improved radiating performance. A MOSFET ( 70 ) has a connecting portion for electrically connecting a surface electrode of a semiconductor pellet and a plurality of inner leads, a resin encapsulant ( 29 ), a plurality of outer leads ( 37 ), ( 38 ) protruding in parallel from the same lateral surface of the resin encapsulant ( 29 ) and a header ( 28 ) bonded to a back surface of the semiconductor pellet and having a header protruding portion ( 28 c ) protruding from a lateral surface of the resin encapsulant ( 29 ) opposite to the lateral surface from which the outer leads protrude, wherein the header ( 28 ) has an exposed surface ( 28 b ) exposed from the resin encapsulant ( 29 ); the outer leads ( 37 ), ( 38 ) are bent; and the exposed of the outer leads ( 37 ), ( 38 ) are provided at substantially the same height.
1. A manufacturing method of a semiconductor device including a MOSFET having a header, a gate outer lead and a plurality of source outer leads, said manufacturing method comprising the steps of:
(a) providing a semiconductor chip having a first main surface and a second main surface opposite to said first main surface, said semiconductor chip having a gate electrode and a source electrode each disposed on said first main surface and a drain electrode disposed on said second main surface;
(b) attaching a first lead frame over said source and gate electrode of said semiconductor chip, said first lead frame having portions which are to be said gate outer lead and said source outer leads, and said gate outer lead and source outer leads being electrically connected with said gate electrode and source electrode respectively;
(c) attaching a second lead frame over said drain electrode of said semiconductor chip, said second lead frame having a portion which is to be said header, and said header being electrically connected with said drain electrode;
(d) after the steps (b)and (c), setting said semiconductor chip, first lead frame and second lead frame in a cavity between a first molding die and a second molding die;
(e) after the step (d), injecting resin into the cavity to form a resin encapsulant;
(f) after the step (e), cutting portions of said first lead frame to form said gate outer lead and source outer leads; and
(g) after the step (e), bending said gate outer lead and source outer leads,
wherein a back surface of said header located directly under the drain electrode is exposed from said resin encapsulant.
2. The manufacturing method according to claim 1 , wherein before the step (b), a plurality of bumps are formed on said gate electrode and source electrode.
3. The manufacturing method according to claim 1 , wherein after the step (g), said gate outer lead and source outer leads form a gull wing configuration.
4. The manufacturing method according to claim 1 , wherein after the step (g), end portions of said gate outer lead and source outer leads are positioned at substantially a same level as a bottom surface of said header.
5. The manufacturing method according to claim 1 , wherein in the step (d), a bottom surface of said second lead frame and an inner surface of said second molding die are contacted.
6. The manufacturing method according to claim 1 , wherein said
semiconductor device has a gate inner lead and a gate connecting piece;
said gate outer lead and inner lead are integrally connected;
said gate inner lead and gate connecting piece are integrally connected; and
said gate outer lead and gate inner lead are protruded from said gate connecting piece,
wherein said semiconductor device has a plurality of source inner leads and a source connecting piece;
said source outer leads and source inner leads are integrally connected;
said source inner leads and source connecting piece are integrally connected; and
said source outer leads and source inner leads are protruded from said source connecting piece.
7. The manufacturing method according to claim 6 , wherein said first lead frame has said gate outer lead, gate inner lead and gate connecting piece;
wherein said first lead frame has said source outer leads, source inner leads and source connecting piece;
wherein said first lead frame has a section frame;
said section frame is integrally connected with said gate outer lead and source outer leads;
wherein in the step (f), a portion of said first lead frame between said section frame and gate outer lead is cut; and
wherein in the step (f), portions of said first lead frame between said section frame and source outer leads are cut.
8. The manufacturing method according to claim 6 , wherein in the step (g), said gate outer lead and source outer leads are bent.