Semiconductor integrated circuit device manufacturing method including static charge elimination
View Patent ↗A sealed type container accommodating a semiconductor substrate is positioned to a load port of a semiconductor manufacturing apparatus. The semiconductor substrate is taken out of the container. An ionizer is used for static-charge-eliminating the semiconductor substrates before and after process treatment in a transport area between the load port and a treatment section. The static-charge-eliminated semiconductor substrate is accommodated in the container positioned to the load port. Thus, it is possible to decrease foreign materials adhering to the semiconductor substrate and errors in handling the semiconductor substrate.
1. A method of manufacturing a semiconductor integrated circuit device, comprising the steps of:
(a) linking an internal space of a sealed type semiconductor-accommodating container which accommodates and is filled with a plurality of wafers grounded, to a local clean chamber of a first wafer treatment apparatus with cleanliness kept in internal space of said local clean chamber;
(b) transporting said wafers accommodated in said sealed type semiconductor-accommodating container under said linking state by means of a transport mechanism disposed in said local clean chamber through said local clean chamber, and thereby accommodating the wafers in a wafer treatment section of said first wafer treatment apparatus through a load lock and unload lock mechanism disposed between said wafer treatment section and said local clean chamber;
(c) performing a first treatment to said wafers accommodated in said wafer treatment section;
(d) after step (c), transporting treated wafers by said transport mechanism through said load lock and unload lock mechanism from said wafer treatment section, and thereby accommodating said treated wafers grounded in said sealed type semiconductor-accommodating container through said local clean chamber;
(e) eliminating static charge of said treated wafers in step (d); and
(f) releasing the linking state between said sealed type semiconductor-accommodating container and said local clean chamber after said step (d), and thereby returning said sealed type semiconductor-accommodating container to a sealed state.
2. The method of manufacturing a semiconductor integrated circuit device according to claim 1 ,
wherein each of said wafers has a diameter of 280 mm or more.
3. The method of manufacturing a semiconductor integrated circuit device according to claim 1 ,
wherein a wafer contact portion of said sealed type semiconductor-accommodating container has a surface resistivity R of 1×10 4 ≦R(Ω)≦1×10 14 .
4. The method of manufacturing a semiconductor integrated circuit device according to claim 1 ,
wherein a wafer contact portion of said sealed type semiconductor-accommodating container has a surface resistivity R of 1×10 5 ≦R(Ω)≦1×10 13 .
5. The method of manufacturing a semiconductor integrated circuit device according to claim 1 ,
wherein a wafer contact portion of said sealed type semiconductor-accommodating container has a surface resistivity R of 1×10 6 ≦R(Ω)≦1×10 9 .
6. The method of manufacturing a semiconductor integrated circuit device according to claim 1 ,
wherein said static charge elimination is performed by an ionizer.
7. The method of manufacturing a semiconductor integrated circuit device according to claim 1 ,
wherein a wafer contact portion of said transport mechanism is static-charge-eliminated in said static elimination of said treated wafers.
8. The method of manufacturing a semiconductor integrated circuit device according to claim 1 ,
wherein a structure which effectuates said eliminating of static charge of said treated wafers is disposed in said local clean chamber.
9. The method of manufacturing a semiconductor integrated circuit device according to claim 8 ,
wherein said structure which effectuates said eliminating of static charge is an ionizer disposed in said local clean chamber.
10. The method of manufacturing a semiconductor integrated circuit device according to claim 1 ,
wherein said eliminating static charge eliminates static charge of treated wafers in said sealed type semiconductor-accommodating container linked to said local clean chamber.
11. The method of manufacturing a semiconductor integrated circuit device according to claim 10 ,
wherein said eliminating static charge also eliminates static charge of wafers in said load lock and unload lock mechanism.
12. The method of manufacturing a semiconductor integrated circuit device according to claim 1 ,
wherein a wafer contact portion of said transport mechanism is nonconductive.
13. The method of manufacturing a semiconductor integrated circuit device according to claim 12 ,
wherein said wafer contact portion of said transport mechanism is of a nonconductive resin.
14. The method of manufacturing a semiconductor integrated circuit device according to claim 1 ,
wherein said eliminating static charge eliminates static charge on treated wafers passing through said local clean chamber.