Method for manufacturing a perpendicular magnetic recording head

1. A method for manufacturing a perpendicular magnetic recording head comprising;

providing a chemical mechanical planarization (CMP) uniformity structure having an aperture therein;

forming a perpendicular magnetic recording pole within the aperture;

fabricating an insulator after formation of the perpendicular magnetic recording pole; and

performing a CMP to remove a portion of the insulator, exposing a portion of the perpendicular magnetic recording pole and planarizing an exposed surface of the perpendicular magnetic recording head.

2. The method of claim 1 wherein providing the CMP structure further comprising a step of

creating a CMP support structure, the CMP support structure being insulating.

3. The method of claim 2 wherein providing the CMP structure further comprising a step of

constructing a CMP barrier layer on the CMP support structure.

4. The method of claim 3 wherein the CMP barrier layer has a CMP removal rate less than an insulator CMP removal rate for the insulator for the CMP used in removing the insulator.

5. The method of claim 3 wherein the CMP support structure has a thickness at least equal to a desired thickness of the perpendicular magnetic recording pole.

6. The method of claim 3 wherein the CMP support structure has a thickness of at least 0.1 μm and no more than 0.4 μm.

7. The method of claim 1 wherein forming the perpendicular magnetic recording pole further comprising

plating the perpendicular magnetic recording pole; and

trimming the perpendicular magnetic recording pole.

8. The method of claim 7 wherein a side of the perpendicular magnetic recording pole has a negative angle with respect to a vertical direction such that a top of the perpendicular magnetic recording pole is wider than a bottom of the perpendicular magnetic recording pole.

9. The method of claim 7 wherein forming the perpendicular magnetic recording pole further comprising

forming a seed layer for the perpendicular magnetic recording pole; and

creating a pattern for the perpendicular magnetic recording pole.

10. The method of claim 1 further comprising:

fabricating a write gap on the exposed surface above the perpendicular magnetic recording pole; and

making a shield on the write gap.

11. A method for manufacturing a perpendicular magnetic recording head comprising;

providing a chemical mechanical planarization (CMP) uniformity structure having an aperture therein, the CMP uniformity structure including an insulating CMP support structure and a CMP barrier layer on the CMP support structure;

fabricating a seed layer;

creating a pattern having a pole aperture therein, the pole aperture being above the aperture in the CMP uniformity structure;

plating a perpendicular magnetic recording pole within the pole aperture, the perpendicular magnetic recording pole having a thickness;

removing the pattern;

forming an insulator after formation of the perpendicular magnetic recording pole; and

performing a CMP to remove a portion of the insulator, exposing a portion of the perpendicular magnetic recording pole and planarizing an exposed surface of the perpendicular magnetic recording head, the CMP support structure allowing the exposed surface to have a deviation of less than the thickness of the perpendicular magnetic recording pole.