Method for manufacturing a perpendicular magnetic head
View Patent ↗A method of manufacturing a perpendicular magnetic head is disclosed, including perpendicular magnetic recording head includes forming a primary magnetic pole having a flat top surface, where a shield layer over the primary magnetic pole and at the sides of the primary magnetic pole is formed in a single piece. The distance in the direction perpendicular to the thickness direction between the side surfaces of the primary magnetic pole and the side shield layer is longer than the distance in the thickness direction between the top surface of the primary magnetic pole and the shield layer.
1. A method for manufacturing a perpendicular magnetic recording head which includes: a first magnetic portion including a primary magnetic pole with a track width, the primary magnetic pole being disposed at a surface opposing a recording medium; a second magnetic portion with a width larger than the track width, separated from the first magnetic portion by a gap in a region and directly or indirectly coupled with the first magnetic portion in a region away in a height direction from the surface opposing the recording medium; a coil layer disposed in the gap, wound around the first magnetic portion, and in which the first magnetic portion generates a magnetic field to record magnetic data onto the recording medium, the method comprising:
(a) forming the first magnetic portion of a magnetic material;
(b) flattening at least a top surface of the primary magnetic pole;
(c) providing a nonmagnetic material layer at least over the primary magnetic pole from the top surface to sides of the primary magnetic pole;
wherein step (c) comprises:
(i) forming a first nonmagnetic material layer over the primary magnetic pole from the top surface to the sides of the primary magnetic pole;
(ii) cutting an upper portion of the first nonmagnetic material layer so as to expose the top surface of the primary magnetic pole, thereby flattening the top surface of the primary magnetic pole; and
(iii) forming a second nonmagnetic material layer over the primary magnetic pole and the remaining first nonmagnetic material layer; and
(d) forming a shield layer at least over the primary magnetic pole and at the sides of the primary magnetic pole in a single piece with the nonmagnetic material layer therebetween,
wherein the nonmagnetic material layer is formed so that a thickness thereof in the width direction on the side surfaces of the primary magnetic pole is larger than a thickness thereof on the top surface of the primary magnetic pole.
2. The method according to claim 1 , wherein step (c) further comprises:
(iv) forming a third nonmagnetic material layer over the first nonmagnetic material layer before sub step (ii), wherein in sub step (ii), the first nonmagnetic material layer and the third nonmagnetic material layer are cut until the top surface of the primary magnetic pole is exposed, thereby flattening the top surfaces of the primary magnetic pole and the third nonmagnetic material layer; and
(v) removing the third nonmagnetic material layer before sub step (iii).
3. The method according to claim 2 , wherein the third nonmagnetic material layer is formed beyond a height of the primary magnetic pole.
4. The method according to claim 2 , wherein the third nonmagnetic material layer is formed of a material capable of being etched by reactive ion etching.
5. The method according to claim 2 , wherein the first nonmagnetic material layer is formed of at least one material selected from the group consisting of Al 2 O 3 , AlSiO, and AlSiON, and the third nonmagnetic material layer is formed of at least one material selected from the group consisting of SiO 2 , Ta 2 O 5 , Ti, W, Cr, Ta, and oxides and nitrides of Ti, W, Cr, and Ta.