Planar display structure and producing process of the same
A process for producing an active matrix organic light-emitting diode (AMOLED) display is provided. The process includes steps of providing a substrate; forming an active matrix structure having a first semiconductor layer on the substrate; and forming a driving circuit structure having a second semiconductor layer on the substrate wherein the grain size of the second semiconductor layer is larger than that of the first semiconductor layer. The planar display with improved uniform luminance generated from the process is also provided. It includes the substrate; the active matrix structure having the first semiconductor layer with smaller grain size; and the driving circuit structure having the second semiconductor with larger grain size.
1 . A process for producing a planar display comprising steps of:
providing a substrate;
forming an active matrix structure having a first semiconductor layer on said substrate; and
forming a driving circuit structure having a second semiconductor layer on said substrate wherein the grain size of said second semiconductor layer is larger than that of said first semiconductor layer.
2 . The process according to claim 1 , wherein said first semiconductor layer is a micro-silicon layer and said second semiconductor layer is a poly-silicon layer.
3 . The process according to claim 1 , wherein the thickness of said first semiconductor layer is smaller than that of said second semiconductor layer.
4 . The process according to claim 1 , wherein said active matrix structure is an active matrix organic light-emitting diode structure.
5 . A process for producing a planar display comprising steps of:
providing a substrate;
forming a raw semiconductor layer comprising a first portion and a second portion on said substrate; and
performing at least one crystallization procedure to at least one of said first portion and said second portion of said raw semiconductor layer so as to convert said first portion and said second portion into a first semiconductor layer and a second semiconductor layer, respectively, wherein the grain size of said second semiconductor layer is larger than that of said first semiconductor layer.
6 . The process according to claim 5 , wherein said first semiconductor layer forms thereon an active matrix structure and said second semiconductor layer forms thereon a driving circuit structure.
7 . The process according to claim 6 , wherein said active matrix structure is an active matrix organic light-emitting diode structure.
8 . The process according to claim 5 , wherein said first semiconductor layer is a micro-silicon layer and said second semiconductor layer is a poly-silicon layer.
9 . The process according to claim 5 , wherein the thickness of said first semiconductor layer is smaller than that of said second semiconductor layer.
10 . The process according to claim 5 , wherein said raw semiconductor layer is an amorphous silicon layer and the thickness of said first portion of said raw semiconductor layer is smaller than that of said second portion of said raw semiconductor layer.
11 . The process according to claim 5 , wherein said raw semiconductor layer is a micro-silicon layer and said crystallization procedure is performed to convert said second portion of said raw semiconductor layer into a poly-silicon layer.
12 . The process according to claim 5 , wherein said raw semiconductor layer is an amorphous silicon layer with said first and second portions of equal thickness, and said crystallization procedure comprises a first crystallization procedure and a second crystallization procedure for forming said first and said second semiconductor layers,
wherein the energy density applied to said first crystallization procedure is higher than that applied to said second crystallization procedure.
13 . The process according to claim 5 , wherein said crystallization process is one selected from the group comprising a Solid Phase Crystallization (SPC) process, an Excimer Laser Anneal (ELA) process or a Sequential Lateral Solidification (SLS) process.
14 . A planar display comprising:
a substrate;
an active matrix structure formed on said substrate and having a first semiconductor layer; and
a driving circuit structure formed on said substrate and having a second semiconductor layer, the grain size in said second semiconductor layer being larger than that in said first semiconductor layer.
15 . The planar display according to claim 14 , wherein said first semiconductor layer is a micro-silicon layer and said second semiconductor layer is a poly-silicon layer.
16 . The planar display according to claim 14 , wherein said active matrix structure is an active matrix organic light-emitting diode structure.
17 . The planar display according to claim 14 , wherein the thickness of said first semiconductor layer is smaller than that of said second semiconductor layer.
18 . The planar display according to claim 14 , wherein said first semiconductor layer and said semiconductor layer have the same thickness, and said second semiconductor layer is a poly-silicon layer converted from a micro-silicon layer by means of a crystallization procedure.
19 . The planar display according to claim 14 , wherein said first semiconductor layer and said semiconductor layer have the same thickness, and said second semiconductor is a poly-silicon layer converted from a amorphous silicon layer by means of a crystallization procedure having energy larger than that applied on said first semiconductor layer.