Microspectrometer gas analyzer
View Patent ↗A robust, compact spectrometer apparatus for determining respective concentrations or partial pressures of multiple gases in a gas sample with single as well as multiple and even overlapping, absorption or emission spectra that span a wide spectral range.
1. A spectrometer comprising:
an infrared source for projecting an infrared beam;
a gas sample cell positioned in the path of the infrared beam;
a scanning mirror bearing a diffraction grating comprising a plurality of parallel lines and positioned in the path of the infrared beam after passage thereof through the gas sample cell;
a mirror drive for oscillating the scanning mirror about an axis parallel to the diffraction grating lines;
a first focusing element positioned to focus at least one band of interest of the infrared beam as diffracted by the diffraction grating;
a first detector positioned to receive the at least one focused band of interest;
a first detector readout circuit operatively coupled to the first detector to receive a signal from the first detector; and
a synchronizer operatively coupled to the mirror drive and the detector readout circuit, wherein the synchronizer is adapted to synchronize oscillation of the scanning mirror with an output of the first detector readout circuit.
2. The spectrometer of claim 1 , further comprising:
a splitter positioned in the path of the diffracted infrared beam from the scanning mirror;
a second focusing element positioned in a respective path of the discrete bands of interest;
a second detector positioned to receive a focused discrete band of interest; and
a second detector readout circuit operatively coupled to the second detector to receive a signal from the second detector, wherein the synchronizer is adapted to synchronize oscillation of the scanning mirror with an output of at least one of the first and the second detector readout circuits.
3. The spectrometer of claim 2 , wherein the splitter is a dichroic splitter for separating the diffracted infrared beam into discrete bands of interest.
4. The spectrometer of claim 2 , wherein the first focusing element is a lens or a mirror, and the second focusing element is a lens or a mirror.
5. The spectrometer of claim 1 , wherein the first focusing element is a lens or a mirror.
6. The spectrometer of claim 1 , further comprising a large aperture lens disposed between the infrared source and the sample cell.
7. A spectrometer comprising:
an infrared source for projecting an infrared beam;
a gas sample cell positioned in the path of the infrared beam;
a scanning mirror positioned in the path of the infrared beam after passage thereof through the gas sample cell;
a mirror drive for oscillating the scanning mirror;
a first focusing mirror bearing a diffraction grating comprising a plurality of parallel lines, wherein the first focusing mirror is positioned in the path of the infrared beam reflected from the scanning mirror for reflecting, diffracting, and focusing a band of interest from the infrared beam;
a first detector positioned in the path of the band of interest;
a first detector readout circuit operatively coupled to the first detector to receive a signal from the first detector; and
a synchronizer operatively coupled to the mirror drive and the detector readout circuit, wherein the synchronizer is adapted to synchronize oscillation of the scanning mirror with an output of the first detector readout circuit.
8. The spectrometer of claim 7 , further comprising a large aperture lens disposed between the infrared source and the sample cell.
9. The spectrometer of claim 7 , further comprising:
a splitter positioned in the path of the diffracted infrared beam from the scanning mirror;
a focusing element positioned in a respective path of the discrete bands of interest;
a second detector positioned to receive a focused discrete band of interest; and
a second detector readout circuit operatively coupled to the second detector to receive a signal from the second detector, wherein the synchronizer is adapted to synchronize oscillation of the scanning mirror with an output of at least one of the first and the second detector readout circuits.
10. The spectrometer of claim 9 , wherein the splitter is a dichroic splitter for separating the diffracted infrared beam into discrete bands of interest.
11. The spectrometer of claim 9 , wherein the focusing element is a lens or a mirror.
12. A spectrometer comprising:
an infrared source for projecting an infrared beam;
a gas sample cell positioned in the path of the infrared beam;
a scanning mirror positioned in the path of the infrared beam after passage thereof through the gas sample cell;
a mirror drive for oscillating the scanning mirror;
a first diffraction grating positioned in the path of the infrared beam as reflected from the scanning mirror for diffracting the infrared beam;
a first focusing element positioned in the path of a portion of the diffracted infrared beam to focus a band of interest;
a first detector positioned to receive a focused band of interest;
a first detector readout circuit operatively coupled to the first detector to receive a signal from the first detector; and
a synchronizer operatively coupled to the mirror drive and the first detector readout circuit, wherein the synchronizer is adapted to synchronize oscillation of the scanning mirror with an output of the first detector readout circuit.
13. The spectrometer of claim 12 , wherein the first focusing element is a lens or a mirror.
14. The spectrometer of claim 12 , further comprising a large aperture lens disposed between the infrared source and the sample cell.
15. The spectrometer of claim 12 , further comprising:
a first splitter positioned in the path of the diffracted infrared beam from the scanning mirror;
a second focusing element positioned in a respective path of the discrete bands of interest;
a second detector positioned to receive a focused discrete band of interest; and
a second detector readout circuit operatively coupled to the second detector to receive a signal from the second detector, wherein the synchronizer is adapted to synchronize oscillation of the scanning mirror with an output of at least one of the first and the second detector readout circuits.
16. The spectrometer of claim 15 , wherein the first splitter is a dichroic splitter for separating the diffracted infrared beam into discrete bands of interest.
17. The spectrometer of claim 15 , wherein the first focusing element is a lens or a mirror, and the second focusing element is a lens or a mirror.
18. The spectrometer of claim 15 , further comprising:
a third diffraction grating positioned to receive at least one band of interest from the first splitter;
a third focusing element positioned in the path of a band of interest after diffraction thereof;
a third detector positioned in the path of a diffracted band of interest focused by one of the first, the second, or the third focusing mirror; and
a third detector readout circuit operatively coupled to the first, the second, or the third detector to receive a signal from the first, the second, or the third detector, wherein the synchronizer is adapted to synchronize oscillation of the scanning mirror with one of the first, the second, and the third detector readout circuits.
19. The spectrometer of claim 18 , wherein the first focusing element is a lens or a mirror, the second focusing element is a lens or a mirror, and the third focusing element is a lens or a mirror.