Image sensor having micro-lens array separated with trench structures and method of making
An image sensor having micro-lenses is disclosed. The image sensor comprises a plurality of pixels formed in a semiconductor substrate, each pixel including a light sensitive element. A micro-lens is formed over each of the light sensitive elements. Finally, a trench structure surrounds each of the micro-lenses.
1. A method of forming a pixel of an image sensor comprising:
forming a light sensitive element in a semiconductor substrate;
forming a color filter layer over said light sensitive element;
forming a top planarizing layer over said light sensitive element and said color filter layer;
forming a trench structure in said top planarizing layer, said trench structure encompassing said light sensitive element; and
forming a microlens within the interior of said trench structure and over said light sensitive element.
2. The method of claim 1 wherein said trench structure has a rectangular cross section.
3. The method of claim 1 wherein said trench structure is a closed shape.