Method and apparatus for fabricating liquid crystal display device
View Patent ↗A liquid crystal display device has a liquid crystal inserted between first and second substrates and surrounded by a peripheral seal. The liquid crystal is dripped onto the first substrate in an area defined by the seal of the first substrate. The first substrate and the second substrate are joined or bonded together under pressure in a vacuum chamber. The chamber is then exposed to the atmosphere while keeping the first substrate and the second substrate under pressure. The pressure is then released and thereafter light is irradiated onto the peripheral seal. The vacuum chamber includes upper and lower surface plates to support the substrates. The surface plate includes an electrostatic chuck and a vacuum attraction passage provided in the chuck.
1. A method of fabricating a liquid crystal display device, using an apparatus having a chamber into which vacuum and atmospheric pressure can be supplied, a pair of support members for supporting a pair of substrates forming a liquid crystal display device in said chamber, an electrostatic chuck arranged in at least one of said pair of support members, a vacuum attraction passage arranged in said electrostatic chuck, a vacuum attraction line for supplying a vacuum into said vacuum attraction passage, and a communication line for connecting said vacuum attraction passage to the interior of said chamber in communication, said method comprising the steps of:
introducing a vacuum into the vacuum attraction passage of said electrostatic chuck to vacuum attract the substrate;
closing said chamber;
electrostatically attracting said substrate by said electrostatic chuck;
closing said vacuum attraction line; and
opening said communication line.
2. The method according to claim 1 , wherein said step of electrostatically attracting is carried out prior to said step of closing said chamber.
3. The method according to claim 1 , further comprising the steps of:
joining said pair of substrates together under pressure in a vacuum chamber;
exposing said vacuum chamber to an atmosphere while keeping said pair of substrates under pressure; and
setting a seal after removing the pressure exerted on said pair of substrates.