Separating of optical integrated modules and structures formed thereby
View Patent ↗A structure having an optical element thereon has a portion of the structure extending beyond a region having the optical element in at least one direction. The structure may include an active optical element, with the different dimensions of the substrates forming the structure allowing access for the electrical interconnections for the active optical elements. Different dicing techniques may be used to realize the uneven structures.
1. An integrated electro-optical module, comprising:
an active element on a first substrate;
a feature on a second substrate;
a bonding pad on one of the first and second substrates;
a spacer substrate between the first substrate and the second substrate in a vertical direction, a portion of the first and second substrates having the bonding pad thereon extending further in at least one direction than the other substrate; and
an electrical interconnection extending from the active element to the bonding pad through the means for attaching.
2. The integrated electro-optical module of claim 1 , wherein the first and second substrates are attached via the spacer substrate.
3. The integrated electro-optical module of claim 1 , wherein the electrical bonding pad is on the first substrate.
4. The integrated electro-optical module of claim 1 , wherein the bonding pad is on the second substrate.
5. The integrated electro-optical module of claim 4 , further comprising an electrically conductive material between the first and second substrates.
6. The integrated electro-optical module of claim 5 , wherein the electrically conductive material includes solder balls.
7. The integrated electro-optical module of claim 5 , wherein the electrically conductive material is on an element between the first and second substrates.
8. The integrated electro-optical module of claim 1 , wherein the features are optical elements.
9. The integrated electro-optical module of claim 1 , wherein the features are holes.
10. The integrated electro-optical module of claim 1 , wherein the features are indentations.
11. The integrated electro-optical module of claim 1 , wherein the means for attaching hermetically seals the active element.
12. An integrated electro-optical module, comprising:
an active element on a first substrate;
a feature on a second substrate;
a bonding pad on one of the first and second substrates;
means for attaching the first substrate and the second substrate in a vertical direction to one another, a portion of the first and second substrates having the bonding pad thereon extending further in at least one direction than the other substrate;
an electrical interconnection extending from the active element to the bonding pad through the means for attaching, the electrical interconnection including conductive material between the first and second substrates.
13. The integrated electro-optical module of claim 12 , wherein the electrically conductive material includes solder balls.
14. The integrated electro-optical module of claim 13 , wherein the electrically conductive material is on an element between the first and second substrates.
15. The integrated electro-optical module of claim 12 , wherein the means for attaching hermetically seals the active element.
16. The integrated electro-optical module of claim 12 , wherein the features are optical elements.
17. The integrated electro-optical module of claim 12 , wherein the features are holes.
18. The integrated electro-optical module of claim 12 , wherein the features are indentations.
19. The integrated electro-optical module of claim 12 , wherein the electrical bonding pad is on the first substrate.
20. The integrated electro-optical module of claim 12 , wherein the bonding pad is on the second substrate.