Method for fabricating liquid crystal display device
View Patent ↗A method for fabricating a TFT array substrate for a liquid crystal display device is provided. The method includes: preparing a substrate; forming a gate line on the substrate using a first etchant; forming an insulation layer on the gate line; forming a semiconductor layer on a portion of the insulation layer; forming a test line on the insulation layer and source and drain electrodes on the semiconductor layer; forming a passivation layer having passivation hole to expose a portion of the gate line on the substrate; and forming a pixel electrode on the passivation layer by applying a second etchant including HNO 3 , a ferric compound, HClO 4 and flouro compound.
1. A method for fabricating a TFT array substrate for a liquid crystal display device, comprising:
preparing a substrate;
forming a gate line on the substrate using a first etchant;
forming an insulation layer on the gate line;
forming a semiconductor layer on a portion of the insulation layer;
forming a test line on the insulation layer and source and drain electrodes on the semiconductor layer;
forming a passivation layer having passivation hole to expose a portion of the gate line on the substrate; and
forming a pixel electrode on the passivation layer by applying a second etchant including HNO 3 , a ferric compound, HClO 4 and flouro compound.
2. The method of claim 1 , wherein the first etchant and the second etchant have the same composition.
3. The method of claim 1 , wherein forming the gate line includes forming an aluminum alloy layer, and forming a molybdenum layer on the aluminum alloy layer.
4. The method of claim 3 , wherein forming the gate line further includes forming a first portion of a shorting bar.
5. The method of claim 4 , wherein forming the pixel electrode includes:
forming a pixel electrode material on the passivation layer;
removing the pixel electrode material in the passivation hole; and
removing the gate line at the lower portion of the passivation hole, thereby separating the shorting bar and at least a portion of the gate line.
6. The method of claim 5 , wherein the pixel electrode material in the passivation hole and the gate line are removed using the second etchant.
7. The method of claim 1 , wherein forming the passivation hole further includes forming a first contact hole for exposing the test line, a second contact hole for forming a gate pad, and a third contact hole for connecting the drain electrode and the pixel electrode.
8. The method of claim 7 , wherein the passivation hole, the first contact hole, the second contact hole, and the third contact hole are simultaneously formed.
9. The method of claim 1 , wherein forming the pixel electrode includes forming a gate pad.
10. The method of claim 1 , wherein the exposed portion of the gate line includes a portion of the even gate line.
11. The method of claim 1 , wherein the pixel electrode includes an amorphous ITO (Indium Tin Oxide).
12. The method of claim 1 , wherein forming the gate line includes wet etching.
13. The method of claim 1 , wherein forming the gate line using the first etchant that includes HNO 3 , a ferric compound, HClO 4 and flouro compound.
14. The method of claim 1 , wherein the ferric compound is one of Fe(NO 3 ) 3 , FeCl 3 , Fe 2 (SO4) 3 , NH 4 Fe(SO 4 ) 2 .
15. The method of claim 1 , wherein the flouro compound is one of NH 4 F, NH 4 HF 2 , HF, NaF and KF.
16. The method of claim 1 , wherein the first etchant includes 7˜12 wt % HNO 3 , 2˜4 wt % Fe(NO 3 ) 3 , 1˜4 wt % HClO 4 , 0.1˜2.0 wt % NH 4 F.
17. The method of claim 16 , wherein the first etchant is 10 wt % HNO 3 , 3 wt % Fe(NO 3 ) 3 , 3 wt % HClO 4 , 0.4 wt % NH 4 F and water.
18. A method for fabricating a TFT array substrate for a liquid crystal display device, comprising:
preparing a substrate;
forming a gate line and a shorting bar on the substrate;
forming an insulation layer on the gate line;
forming a semiconductor layer on a portion of the insulation layer;
forming a test line on the insulation layer and source and drain electrodes on the semiconductor layer;
forming a passivation layer having passivation hole to expose a portion of the gate line on the substrate; and
patterning a pixel electrode on the passivation layer and removing the gate line at the lower portion of the passivation hole, thereby separating the shorting bar and at least a portion of the gate line by applying an etchant including HNO 3 , a ferric compound, HClO 4 and flouro compound.
19. The method of claim 18 , wherein forming the gate line using the first etchant that includes HNO 3 , a ferric compound, HClO 4 and flouro compound.
20. The method of claim 18 , wherein the ferric compound is one of Fe(NO 3 ) 3 , FeCl 3 , Fe 2 (SO4) 3 , NH 4 Fe(SO 4 ) 2 .
21. The method of claim 18 , wherein the flouro compound is one of NH 4 F, NH 4 HF 2 , HF, NaF and KF.
22. The method of claim 18 , wherein the etchant includes 7˜12 wt % HNO 3 , 2˜4 wt % Fe(NO 3 ) 3 , 1˜4 wt % HClO 4 , 0.1˜2.0 wt % NH 4 F.
23. The method of claim 22 , wherein the etchant is 10 wt % HNO 3 , 3 wt % Fe(NO 3 ) 3 , 3 wt % HClO 4 , 0.4 wt % NH 4 F and water.