Method of fabricating a micro-electromechanical actuator that includes drive circuitry
View Patent ↗A method of fabricating a micro-electromechanical actuator includes the step of forming register, gate and drive transistor circuitry on a substrate such that a number of laterally extending traces define at least part of the drive transistor circuitry. A layer of sacrificial material is formed on the register, gate and drive transistor circuitry such that the configuration of the laterally extending traces is imparted to the sacrificial material. A heater layer of an actuator arm is formed on the layer of sacrificial material such that the heater layer defines a heating circuit and has a series of lateral corrugations as a result of the surface configuration of the sacrificial layer. A mechanical layer of the actuator arm is formed on the heater layer and the layer of sacrificial material is removed.
1. A method of fabricating a micro-electromechanical actuator, the method comprising the steps of:
forming register, gate and drive transistor circuitry on a substrate such that a number of laterally extending traces define at least part of the drive transistor circuitry;
forming a layer of sacrificial material on the register, gate and drive transistor circuitry such that the configuration of the laterally extending traces is imparted to a surface of the sacrificial material, thus defining a surface configuration of the sacrificial layer;
forming a heater layer of an actuator arm on the layer of sacrificial material such that the heater layer defines a heating circuit and has a series of lateral corrugations as a result of the surface configuration of the sacrificial layer;
forming a mechanical layer of the actuator arm on the heater layer; and
removing the layer of sacrificial material.
2. A method as claimed in claim 1 , in which the step of forming the register, gate and drive transistor circuitry comprises the step of carrying out a CMOS process on the substrate.
3. A method as claimed in claim 2 , which includes the step of carrying out an n-well CMOS process to form the register, gate and drive transistor circuitry with one poly and three metal layers.
4. A method as claimed in claim 3 , in which the step of forming the sacrificial layer comprises the step of depositing and etching one of the metal layers of the CMOS process.
5. A method as claimed in claim 1 , in which the step of forming the heater layer comprises the step of depositing and etching the heater layer to define the heater layer and a working member fast with an end of the actuator arm and electrically isolated from the heating circuit.
6. A method as claimed in claim 5 , which includes the step of forming nozzle chamber walls on the substrate such that the working member is positioned in a nozzle chamber defined by the nozzle chamber walls.
7. A method as claimed in claim 1 , which includes the step of forming a compensation layer on the mechanical layer with substantially the same deposition characteristics as the heater layer and of substantially the same material and configuration as the heater layer, such that the mechanical layer is sandwiched between the heater layer and the compensation layer.