Mask for photolithography, method of forming thin film, liquid crystal display device, and method of producing the liquid crystal display device
View Patent ↗A mask for photolithography in which a semi-transmission film is formed so that the phase difference of lights passing through a semi-transmission portion and a transmission portion of the mask for photolithography is between (−¼+2 m) π and (¼+2 m) π inclusive, where m is an integer. The invention makes it possible to efficiently and properly form a thin film having a multi-step structure by a single process.
1. A photolithography system comprising:
a mask having a light-shielding area and a plurality of transmission areas;
wherein characteristics of adjacent transmission areas are varied such that there is a phase difference for a light that has passed through adjacent transmission areas, so that a thin-film pattern is formed in which the number of steps thereof is greater than the number of transmission areas having varied characteristics, and wherein a lowest level of the resultant thin film pattern for adjacent portions resulting from different adjacent transmission areas is no less than a lowest level of the two adjacent levels; and
a source of illumination for transmitting light to the adjacent transmission areas.
2. The photolithography system according to claim 1 , wherein the plurality of transmission areas comprise transmission areas having different Light transmittances.
3. The photolithography system according to claim 1 , wherein the thickness of the adjacent transmission areas is substantially the same.
4. The photolithography system according to claim 1 , wherein the mask consists of three transmission areas having different characteristics from each other, and the thin-film pattern includes four steps.
5. The photolithography system according to claim 1 , wherein the plurality of transmission areas comprise transmission areas having different refractive indices.
6. A method of forming a thin film comprising:
performing photolithography by exposing a mask to light, wherein the mask comprises a light-shielding area and a plurality of transmission areas, and
wherein characteristics of adjacent transmission areas are varied such that there is a phase difference for light that has passed through adjacent transmission areas so that a thin-film pattern in which the number of steps thereof is greater than the number of transmission areas is formed, and wherein a lowest level of the resultant thin film pattern for adjacent portions resulting from different adjacent transmission areas is no less than a lowest level of the two adjacent levels; and
wherein exposing the mask is comprised of exposing the mask to the light.
7. The method of forming a thin film according to claim 6 , wherein the plurality of transmission areas comprise transmission areas having different light transmittances.
8. The method of forming a thin film according to claim 6 , wherein the mask for photolithography is disposed with a gap having a size between 50 pm and 500 pm inclusive being provided between the mask and what is subjected to a thin-film forming operation.
9. The method of forming a thin film according to claim 6 , wherein the thickness of the adjacent transmission areas is substantially the same.
10. The method of forming a thin film according to claim 6 , wherein the mask consists of three transmission areas having different characteristics from each other, and the thin-film pattern includes four steps.
11. The method of forming a thin film according to claim 6 , wherein the plurality of transmission areas comprise transmission areas having different refractive indices.
12. A method of producing a liquid crystal display device comprising the step of:
carrying out a photolithography process in which exposure is performed using a mask for photolithography in order to form a thin-film pattern,
wherein the mask for photolithography comprises a light-shielding area and a plurality of transmission areas, and
wherein characteristics of adjacent transmission areas are varied such that there is a phase difference for a light that has passed through adjacent transmission areas so that a thin-film pattern in which the number of steps thereof is greater than the number of transmission areas is formed, and wherein a lowest level of the resultant thin film pattern for adjacent portions resulting from different adjacent transmission areas is no less than a lowest level of the two adjacent levels; and
exposing the mask to the light.
13. The method of producing a liquid crystal display device according to claim 12 , wherein the plurality of transmission areas comprise transmission areas having different light transmittances.
14. The method of producing a liquid crystal display device according to claim 12 , wherein the mask for photolithography is disposed with a gap having a size between 50 pm and 500 pm inclusive being provided between the mask and what is to be subjected to a thin-film forming operation.
15. The method of producing a liquid crystal display device according to claim 12 , wherein the thickness of the adjacent transmission areas is substantially the same.
16. The method of producing a liquid crystal display device according to claim 12 , wherein the mask consists of three transmission areas having different characteristics from each other, and the thin-film pattern includes four steps.
17. The method of producing a liquid crystal display device according to claim 12 , wherein the plurality of transmission areas comprise transmission areas having different refractive indices.