Gas flowmeter and manufacturing method thereof
View Patent ↗A gas flowmeter capable of reducing a secular change comprises a silicon semiconductor substrate formed with a cavity and a heat element formed above the cavity of the semiconductor substrate by way of an insulating film. The heat element is a silicon (Si) semiconductor thin film impurity-doped at high concentration. Stoichiometrically stable silicon nitride (Si 3 N 4 ) thin films as barrier layers which less permeate and less absorb hydrogen in the heat generating temperature range of the heat element are formed above and below the silicon (Si) semiconductor thin film.
1. A gas flow meter for measuring a flow rate of a gas to be measured comprising:
a semiconductor substrate formed with a cavity; and
at least a heat element formed in an insulating film above the cavity of the semiconductor substrate; wherein,
the heat element comprises a silicon (Si) semiconductor thin film applied with impurity doping at high concentration; and
the gas flow meter has barrier layers that are disposed as an upper layer and a lower layer of the silicon (Si) semiconductor thin film and that are formed in a region to cover at least the cavity, the barrier layers being less permeable and absorbent to hydrogen in a heat generating temperature range of the heat element and the barrier layers inhibiting diffusion and association of hydrogen from said silicon semiconductor thin film which forms said heating elements.
2. A gas flow meter as defined in claim 1 , wherein the barrier layer comprises a stoichiometrically stable silicon nitride (Si 3 N 4 ) thin film.
3. A gas flow meter as defined in claim 1 , wherein the silicon (Si) semiconductor thin film is a polycrystalline silicon (Si) semiconductor thin film applied with impurity-doping, and
the polycrystalline silicon (Si) semiconductor thin film is doped with phosphorus (P) or boron (B) as impurities at a high concentration.
4. A gas flow meter as defined in claim 1 , wherein the doping is applied at such high concentration that resistivity of the silicon (Si) semiconductor thin film is 8×10 −4 Ωcm or less.
5. A flow meter for measuring a flow rate of a gas to be measured comprising:
a semiconductor substrate formed with a cavity; and
at least a heat element comprising a silicon semiconductor thin film formed in an insulating film above the cavity of the semiconductor substrate; wherein,
the silicon (Si) semiconductor thin film is a polycrystalline applied with impurity doping of phosphorus (P) or boron (B) as impurities at high concentration; and
the gas flow meter has barrier layers that are disposed as an upper layer and a lower layer of the silicon (Si) semiconductor thin film, and are formed in a region to cover at least the cavity, the barrier layers being less permeable and absorbent to hydrogen in a heat generating temperature range and the barrier layers inhibiting diffusion and association of hydrogen from said silicon semiconductor thin film which forms said heating elements.
6. A gas flow meter as defined in claim 5 , wherein the doping is applied at such high concentration that resistivity of the silicon (Si) semiconductor thin film is 8×10 −4 Ωcm or less.
7. Apparatus for measuring a gas flow rate, comprising:
a semiconductor substrate formed with an opening therein; and
at least one heating element formed in a multilayer film structure which covers said opening, said heating element comprising a silicon semiconductor thin film with impurity doping at a high concentration;
wherein, said multilayer film structure includes upper and lower film means, formed on opposite sides of said heating element, for inhibiting diffusion and dissociation of hydrogen from said silicon semiconductor thin film which forms said heating elements.