IP Library › Granted Patent US 7,153,182
Granted Patent B1
US 7,153,182 · App. 10/955,044 · Granted Dec 26, 2006

System and method for in situ characterization and maintenance of polishing pad smoothness in chemical mechanical polishing

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Quick Facts
Patent No.
US 7,153,182
App. No.
10/955,044
Granted
Dec 26, 2006
Kind
B1
Abstract

A system and method for in situ measurement and maintenance of preferred pad smoothness in a CMP process is disclosed. The system includes a linear polisher having one or more sensors for detecting fluid pressure, fluid flow or motor current at the linear polisher during a polishing process. A controller receiving the information provided by the sensors includes an algorithm for adjusting the pad conditioning process to achieve a desired pad smoothness based on the sensor data. The method includes obtaining baseline data on preferred linear polisher characteristics associated with desired pad smoothness and using the baseline data to adjust a pad conditioning regimen on a linear polisher to achieve the desired pad smoothness in situ.

Claims (12)

1. An apparatus for in situ measurement of polishing pad smoothness comprising:

a belt movably mounted on at least one roller, wherein a roller motor rotatably drives the at least one roller;

a platen disposed underneath the belt, the platen configured to dispense a fluid bearing between the platen and the belt, the belt comprising a polishing pad positioned on a side of the belt facing away from the platen;

a flow meter in communication with a fluid supply line connected with the platen, the flow meter monitoring a flow rate of fluid to the platen;

a sensor in communication with the fluid bearing to measure a pressure change of the fluid while a material is polished; and

a controller in communication with at least one of the sensor, the flow meter or the roller motor, the controller operative to monitor a pad smoothness during a wafer polishing process based on receipt of pad smoothness information at the controller, the pad smoothness information comprising at least one of a roller motor current sensed at the roller motor, a fluid flow rate sensed at the flow meter or a pressure sensed at the fluid bearing.

2. The apparatus of claim 1 , further comprising a pad conditioner operatively engageable with the polishing pad, and wherein the controller is configured to control the pad conditioner in response to the monitored pad smoothness.

3. The apparatus of claim 2 , wherein the controller is configured to maintain a desired pad smoothness by monitoring the pad smoothness information and applying the pad conditioner to the polishing pad until the pad smoothness information falls within a predetermined range indicative of the desired pad smoothness.

4. The apparatus of claim 3 , wherein the pad smoothness information comprises only one of the roller motor current, the fluid flow rate or the pressure.

5. The apparatus of claim 3 , wherein the pad smoothness information comprises at least two of the roller motor current, the fluid flow rate or the pressure.

6. The apparatus of claim 1 , wherein said fluid bearing dispenses a liquid.

7. The apparatus of claim 1 , wherein said fluid bearing dispenses a gas.