Power and ground buss layout for reduced substrate size
View Patent ↗A semiconductor substrate for a micro-fluid ejection device. The substrate includes plurality of micro-fluid ejection actuators disposed adjacent a fluid supply slot in the semiconductor substrate. A plurality of power transistors, occupying a power transistor active area of the substrate, are disposed adjacent the ejection actuators and are connected through a first metal conductor layer to the ejection actuators. An array of logic circuits, occupying a logic circuit area of the substrate, is disposed adjacent the plurality of power transistors and is connected through a polysilicon conductor layer to the power transistors. A power conductor and a ground conductor for the ejection actuators is routed in a second metal conductor layer. The power conductor overlaps at least a portion of the power transistor active area of the substrate and the ground conductor overlaps at least a portion of the logic circuit area of the substrate.
1. A semiconductor substrate for a micro-fluid ejection device, the substrate comprising:
a plurality of micro-fluid ejection actuators disposed in a columnar array adjacent a fluid supply slot in the semiconductor substrate;
a plurality of power transistors disposed in a columnar array adjacent the ejection actuators and connected through a first metal conductor layer to the ejection actuators, the columnar array of power transistors occupying a power transistor active area of the substrate;
a columnar array of logic circuits disposed adjacent the columnar array of power transistors and connected through a polysilicon conductor layer to the power transistors, the columnar array of logic circuits occupying a logic circuit area of the substrate;
a power conductor for the ejection actuators routed in a second metal conductor layer disposed in overlapping relationship with at least a portion of the power transistor active area of the substrate; and
a ground conductor for the ejection actuators routed in the second metal conductor layer disposed in overlapping relationship with at least a portion of the logic circuit area of the substrate.
2. The semiconductor substrate of claim 1 , wherein the fluid ejection actuators comprise heater resistors.
3. The semiconductor substrate of claim 1 , wherein the semiconductor substrate contains at least three fluid supply slots and associated ejection actuators, power transistors, logic circuits and conductors.
4. The semiconductor substrate of claim 1 , wherein the power transistors comprise field effect transistors (FETS).
5. The semiconductor substrate of claim 1 , wherein the logic circuits comprises circuits selected from the group consisting of primitive address logic, predrive circuits, data registers, and combinations of two or more of the foregoing.
6. The semiconductor substrate of claim 1 , further comprising a columnar array of temperature sense resistors disposed between the columnar array of power transistors and the columnar array of ejection actuators.
7. The semiconductor substrate of claim 6 , wherein the temperature sense resistors comprise non-metal temperature sense resistor material.
8. A micro-fluid ejection head comprising the substrate of claim 1 .