Semiconductor memory element, semiconductor device and control method thereof
View Patent ↗In a semiconductor flash memory required to have high reliability, injection and extraction of electrons must be performed through an oxide film obtained by directly oxidizing a silicon substrate. Accordingly, the voltage to be used is a large voltage ranging from positive to negative one. In contrast, by storing charges in a plurality of dispersed regions, high reliability is achieved. Based on the high reliability, transfer of electrons is permitted through not only the oxide film obtained by directly thermally oxidizing a high reliability silicon substrate but also another oxide film deposited by CVD, or the like. In consequence, a device is controlled by electric potentials of the same polarity upon writing of data and upon erasing of data.
1. A semiconductor memory element, comprising:
a channel region comprised of a semiconductor, the channel region including a first channel region which is a part of the channel region, and a second channel region which is a part of the channel region, and different from the first channel region,
a plurality of charge storage regions in the vicinity of the channel region,
a first gate electrode comprised of a metal or a semiconductor for controlling the electric potential of the first channel region, and
a second gate electrode comprised of a metal or a semiconductor for controlling the electric potential of the second channel region,
the electric potential to be applied to the first gate electrode upon writing of data and the electric potential to be applied to the first gate electrode upon erasing of data having the same polarity,
wherein the charge storage regions are comprised of a plurality of independent and electrically isolated microcrystal grains.
2. A semiconductor memory element according to claim 1 , wherein the microcrystal grains are comprised of silicon.
3. A semiconductor memory element according to claim 1 , wherein the plurality of microcrystal grains have a mean size of 10 nm.
4. A semiconductor memory element according to claim 3 , wherein the microcrystal grains are comprised of silicon.
5. A semiconductor memory element according to claim 1 ,
wherein the microcrystal grains are arranged such that a leak path existing on one of the microcrystal grains will not prevent the other microcrystal grain from holding charge.
6. A semiconductor memory element according to claim 5 ,
wherein the microcrystal grains are comprised of silicon.
7. A semiconductor memory element, comprising:
a channel region comprised of a semiconductor, the channel region including a first channel region which is a part of the channel region, and a second channel region which is a part of the channel region, and different from the first channel region,
a plurality of charge storage regions in the vicinity of the channel region,
a first gate electrode comprised of a metal or a semiconductor for controlling the electric potential of the first channel region, and
a second gate electrode comprised of a metal or a semiconductor for controlling the electric potential of the second channel region,
the electric potential to be applied to the first gate electrode upon writing of data and the electric potential to be applied to the second gate electrode upon erasing of data having the same polarity,
wherein the charge storage regions are comprised of a plurality of
independent and electrically isolated microcrystal grains.
8. A semiconductor memory element according to claim 7 ,
wherein the microcrystal grains are comprised of silicon.
9. A semiconductor memory element according to claim 7 ,
wherein the plurality of microcrystal grains have a mean size of 10 nm.
10. A semiconductor memory element according to claim 8 ,
wherein the microcrystal grains are comprised of silicon.
11. A semiconductor memory element according to claim 7 ,
wherein the microcrystal grains arranged such that a leak path existing on one of the microcrystal grains will not prevent the other microcrystal grain from holding charge.
12. A semiconductor memory element according to claim 11 ,
wherein the microcrystal grains are comprised of silicon.
13. A semiconductor memory element, comprising:
a source region,
a drain region,
a channel region comprised of a semiconductor, the channel region including a first channel region which is a part of the channel region, and a second channel region which is a part of the channel region, and different from the first channel region,
the source region and the drain region being connected by the channel region,
a plurality of charge storage regions in the vicinity of the channel region,
a first gate electrode comprised of a metal or a semiconductor for controlling the electric potential of the first channel region, and
a second gate electrode comprised of a metal or a semiconductor for controlling the electric potential of the second channel region,
the electric potential to be applied to the first gate electrode upon writing of data and the electric potential to be applied to the first gate electrode upon erasing of data having the same polarity,
wherein the charge storage regions are comprised of a plurality of independent and electrically isolated microcrystal grains.
14. A semiconductor memory element according to claim 13 ,
wherein the microcrystal grains are comprised of silicon.
15. A semiconductor memory element according to claim 13 ,
wherein the plurality of microcrystal grains have a mean size of 10 nm.
16. A semiconductor memory element according to claim 14 ,
wherein the microcrystal grains are comprised of silicon.
17. A semiconductor memory element according to claim 13 ,
wherein the microcrystal grains arranged such that a leak path existing on one of the microcrystal grains will not prevent the other microcrystal grain from holding charge.
18. A semiconductor memory element according to claim 17 ,
wherein the microcrystal grains are comprised of silicon.
19. A semiconductor memory element, comprising:
a source region,
a drain region,
a channel region comprised of a semiconductor, the channel region including a first channel region which is a part of the channel region, and a second channel region which is a part of the channel region, and different from the first channel region,
the source region and the drain region being connected by the channel region,
a plurality of charge storage regions in the vicinity of the channel region,
a first gate electrode comprised of a metal or a semiconductor for controlling the electric potential of the first channel region, and
a second gate electrode comprised of a metal or a semiconductor for controlling the electric potential of the second channel region,
the electric potential to be applied to the first gate electrode upon writing of data and the electric potential to be applied to the second gate electrode upon erasing of data having the same polarity,
wherein the charge storage regions are comprised of a plurality of independent and electrically isolated microcrystal grains.
20. A semiconductor memory element according to claim 19 ,
wherein the microcrystal grains are comprised of silicon.
21. A semiconductor memory element according to claim 19 ,
wherein the plurality of microcrystal grains have a mean size of 10 nm.
22. A semiconductor memory element according to claim 21 ,
wherein the microcrystal grains are comprised of silicon.
23. A semiconductor memory element according to claim 19 ,
wherein the microcrystal grains arranged such that a leak path existing on one of the microcrystal grains will not prevent the other microcrystal grain from holding charge.
24. A semiconductor memory element according to claim 23 ,
wherein the microcrystal grains are comprised of silicon.