Semiconductor integrated circuit device having a conductive film which contains metal atoms bondable to a halogen element
View Patent ↗The semiconductor device is formed according to the following steps. A TiN film 71 and a W film 72 are deposited on a silicon oxide film 64 including the inside of a via-hole 66 by the CVD method and thereafter, the W film 72 and TiN film 71 on the silicon oxide film 64 are etched back to leave only the inside of the via-hole 66 and form a plug 73 . Then, a TiN film 74 , Al-alloy film 75 , and Ti film 76 are deposited on the silicon oxide film 64 including the surface of the plug 73 by the sputtering method and thereafter, the Ti film 76 , Al-alloy film 75 , and TiN film 74 are patterned to form second-layer wirings 77 and 78.
1. A semiconductor integrated circuit device comprising:
a substrate;
a titanium nitride film formed over the substrate and containing a halogen element;
a first conductive film formed over the substrate; and a second conductive film formed between the titanium nitride film and the first conductive film, the second conductive film containing metal atoms bondable to the halogen element, and having a greater capacity to trap the halogen element than tungsten,
wherein the second conductive film is a film deposited by a CVD method using a material gas with a halogen free element after polishing the titanium nitride film by a CMP method, or deposited by sputtering in a halogen free ambient after polishing the titanium nitride film by a CMP method.
2. A semiconductor integrated circuit device according to claim 1 , wherein the second conductive film is a titanium film or a tantalum film.
3. A semiconductor integrated circuit device according to claim 1 , wherein the second conductive film is a multilayer film including a titanium film or a tantalum film.
4. A semiconductor integrated circuit device according to claim 1 , wherein the second conductive film has a thickness of at least 5 nm.
5. A semiconductor integrated circuit device according to claim 1 , wherein the first conductive film is an aluminum film, an aluminum alloy film, a copper film, or a copper alloy film.