AlAs/GaAs alloy to enhance n-type doping in AlGaAs distributed bragg reflector
View Patent ↗Distributed Bragg reflector (DBR) with reduced DX centers. A DBR includes an AlAs region. The AlAs region includes essentially homogeneous AlAs. The DBR further includes a A1GaAs region. The AlGaAs region includes alternating thin layers of AlAs and GaAs. The alternating thin layers of AlAs and GaAs are arranged such the the AlGaAs region appears as a layer of A1GaAs with appropriate concentrations of Al and Ga.
1. A distributed Bragg reflector (DBR) comprising:
a plurality of AlAs regions that comprise a layer of AlAs; wherein the plurality of AlAs regions includes a first AlAs region and a second AlAs region;
a plurality AlGaAs regions alternating with the AlAs region, wherein at least one AlGaAs region is a composite comprising:
a plurality of thin AlAs layers and a plurality of thin GaAs layers, wherein the thin AlAs layers and the thin GaAs layers are each essentially homogenous; and
the plurality of thin GaAs layers alternating with the plurality of thin AlAs layers, wherein each of the plurality of thin AlAs layers and each of the plurality of thin GaAs layers are between 10 and 100 Angstroms thick, such that the alternating thin layers of AlAs and the alternating thin layers of GaAs together form an AlGaAs region;
wherein the composite AlGaAs region adjoins the first AlAs region beneath the first AlAs region and adjorns the second AlAs region above the second AlAs region.
2. The DBR of claim 1 wherein the AlGaAs region has an Al concentration between 40% and 60%. are between 10 and 100 Angstroms thick.
3. The DBR of claim 1 , wherein the AlGaAs region has an Al concentration less than 20%.
4. The DBR of claim 1 , wherein the AlGaAs region has a Ga concentration of less than 40%.
5. The DBR of claim 1 , wherein the AlGaAs region has a Ga concentration less than 20%.
6. The DBR of claim 1 , wherein at least a portion of the AlGaAs region is doped with n-type dopant.
7. The DBR of claim 6 , wherein the dopant comprises at least one of Si, Te, Sn, Se and S.
8. The DBR of claim 6 , wherein the dopant has a concentration of at least n=1×10 18 cm −3 .
9. The DBR of claim 1 , wherein the DBR is configured to be used with a 650-670 nm VCSEL.
10. A method of making a distributed Bragg reflector (DBR) comprising:
forming an AlAs region that comprises a layer of AlAs, wherein the plurality of AlAs regions includes a first AlAs region and a second AlAs region;
forming a plurality of composite AlGaAs region that alternates with the plurality of AlAs regions, wherein forming a composite AlGaAs region comprises:
forming a plurality of thin AlAs layers and a plurality of thin GaAs layers, wherein the thin AlAs layers and the thin GaAs layers are each essentially homogenous; and
alternating the plurality of thin GaAs layers the plurality of thin AlAs layers, wherein each of the plurality of thin alAs layers and each of the plurality of thin GaAs layers between 10 and 100 angstrom thick, such that the alternating thin layers of AlAs and the alternating thin layers of GaAs together form an AlGaAs region;
wherein the composite AlGaAs region adjorns the first AlAs region beneath the first AlAs region and adjorns the second AlAs region above the second AlAs region.
11. The method of claim 10 , wherein the composite AlGaAs region has an Al concentration of less than 60%.
12. The method of claim 10 , wherein the composite AlGaAs region has a Al concentration less than 20%.
13. The method of claim 10 , wherein the composite AlGaAs region has a Ga concentration of less than 60%.
14. The method of claim 10 , wherein the composite AlGaAs region has a Ga concentration less than 20%.
15. The method of claim 10 , further comprising doping at least a portion of the AlGaAs region with n-type dopant.
16. The method of claim 15 , wherein doping at least a portion of the AlGaAs region comprises doping the AlGaAs region with at least one of Si, Te, Sn, Se and S.
17. The method of claim 15 , wherein the dopant has a concentration of at least n=1×10 18 cm −3 .
18. The DBR of claim 10 , wherein the DBR is configured to be used with a 650-670 nm VCSEL.
19. The method of claim 10 , wherein the method is performed using metal organic chemical vapor deposition.
20. The method of claim 10 , wherein the method is performed using molecular beam epitaxy.
21. The method of claim 1 , wherein the AlGaAs region has an Al concentration less than 40%.
22. The method of claim 10 , wherein the composite AlGaAs region has a GA concentration less than 40%.