Fluorescence detecting device with integrated circuit and photodiode, and detection method
View Patent ↗A fluorescence detecting device is configured so that a semiconductor integrated circuit substrate includes a photodiode and a signal detecting circuit for detecting charges obtained as a result of photoelectric conversion by the photodiode, and a fluorescence reaction vessel where a fluorescence reaction occurs is arranged above the foregoing photodiode. Furthermore, in the device, an excitation-light-entry preventing layer is provided at one or more of a surface portion of the photodiode and a position between the photodiode and the fluorescence reaction vessel.
1. A fluorescence detecting device comprising:
a semiconductor integrated circuit substrate including a plurality of photodiodes and a signal detecting circuit for detecting charges obtained as a result of photoelectric conversion by the plurality of photodiodes; and
a fluorescence reaction vessel where a fluorescence reaction occurs, the fluorescence reaction vessel being formed on the plurality of the photodiodes, with a plurality of photodiodes provided per one fluorescence reaction vessel;
wherein the fluorescence reaction in the one fluorescence reaction vessel generates fluorescence that enters the plurality of photodiodes and is subjected to the photoelectric conversion, and
wherein an excitation-light-entry preventing layer is formed at either or both of a surface portion of the plurality of photodiodes and a position between the plurality of photodiodes and the fluorescence reaction vessel;
wherein the photodiodes include a high concentration first-conductivity-type semiconductor layer, a second-conductivity-type semiconductor layer, and a low-concentration first-conductivity-type semiconductor layer that are laminated in the stated order from a surface side of the photodiodes, wherein
when a reverse bias is applied, a part of the high-concentration first-conductivity- type semiconductor layer is not depleted, and the second-conductivity-type semiconductor layer is depleted, and
the high-concentration first-conductivity-type semiconductor layer constitutes the excitation-light-entry preventing layer.
2. The device according to claim 1 , wherein the excitation-light-entry preventing layer is a light absorbing layer that absorbs an excitation light, and is arranged between the photodiodes and the fluorescence reaction vessel.
3. The device according to claim 1 , wherein the excitation-light-entry preventing layer is a light interference layer that reflects an excitation light, and is arranged between the photodiodes and the fluorescence reaction vessel.
4. The device according to claim 1 , wherein
the excitation-light-entry preventing layer is a gas layer, and is arranged between the photodiodes and the fluorescence reaction vessel, and
an excitation light is set so as to be incident in a direction such that the excitation light is reflected totally at an interface between the gas layer and a bottom face of die fluorescence reaction vessel.
5. The device according to claim 1 , wherein a single-strand DNA is fixed on an internal bottom face of the fluorescence reaction vessel.
6. The device according to claim 1 , wherein at least one selected from an antibody and an antigen is fixed on an internal bottom face of the fluorescence reaction vessel.
7. A fluorescence detecting method employing the fluorescence detecting device according to claim 1 , the method comprising:
causing excitation light to enter the fluorescence reaction vessel; and
detecting a fluorescence generated as a result of the entry of the excitation light by means of the photodiodes.
8. The device according to claim 1 , wherein signal charges generated in the plurality of photodiodes arc accumulated, and the accumulated charge is measured to detect fluorescence.