Liquid crystal display panel device with a transparent conductive film formed pixel electrode and gate pad and data pad on substrate and method of fabricating the same
View Patent ↗A liquid crystal display panel device includes a thin film transistor array substrate having a gate line provided on a substrate, a data line intersecting the gate line and having a gate insulating pattern disposed therebetween to define a pixel area, a thin film transistor provided at the intersection between the gate line and the data line, a protective film for protecting the thin film transistor, a pixel electrode provided at the pixel area and connected to the thin film transistor, a gate pad connected to the gate line and formed from a transparent conductive film included in the gate line, and a data pad connected to the data line and formed from the transparent conductive film, and a color filter array substrate joined with the thin film transistor array substrate to be opposed to each other, wherein the protective film is provided at an area where it overlaps with the color filter array substrate to expose the transparent conductive films included in the gate pad and the data pad.
1. A method of fabricating a liquid crystal display panel device, the method comprising:
providing a lower array substrate comprising:
a gate line provided on a substrate, wherein the gate line is formed of a double-layer structure including a transparent conductive film and a gate metal film sequentially;
a data line provided on a substrate intersecting the gate line to define a pixel area;
a thin film transistor provided at the intersection between the gate line and the data line, the thin film transistor having a semiconductor pattern;
a protective film for protecting the thin film transistor;
a pixel electrode directly formed on the pixel area of the substrate, the pixel electrode being directly connected to a drain electrode of the thin film transistor, and being formed of the transparent conductive film;
a gate pad connected to the gate line and formed from the transparent conductive film; and
a data pad connected to the data line and formed from the transparent conductive film;
providing a color filter array substrate opposed to the thin film transistor array substrate;
joining the thin film transistor array substrate with the color filter array substrate to expose a pad area including the gate pad and the data pad; and
exposing the transparent conductive film at the pad area using the color filter array substrate as a mask,
wherein the pixel electrode, the gate pad and the data pad include the same transparent conductive film,
wherein the semiconductor pattern forms a channel between a source electrode and the drain electrode and include an active layer partially overlapping with a gate electrode of the thin film transistor,
wherein the semiconductor pattern includes an ohmic contact layer for making ohmic contact with the data line, the source electrode, and the drain electrode,
wherein each of the gate pad and the data pad is formed of a single layer that is identical with the transparent conductive film of the pixel electrode, and
wherein the gate pad and the data pad are directly contacted with the substrate.
2. The method according to claim 1 , wherein the step of providing the lower array substrate includes:
forming gate patterns having the gate line, the gate electrode, the gate pad, and the data pad including the transparent conductive film and the pixel electrode on the substrate;
forming a semiconductor pattern and a gate insulating pattern on the substrate provided with the gate patterns and the pixel electrode and exposing the transparent conductive films included in the data pad, the gate pad, and the pixel electrode;
forming a data pattern including the data line, a source electrode, and a drain electrode on the substrate provided with the semiconductor pattern and the gate insulating pattern; and
forming a protective film on the substrate provided with the data pattern.
3. The method according to claim 1 , wherein the step of providing the lower array substrate includes:
forming gate patterns having the gate line, the gate electrode, the gate pad, the common line, the common electrode, the common pad, and the data pad including the transparent conductive film and the pixel electrode on the substrate;
forming a semiconductor pattern and a gate insulating pattern on the substrate provided with the gate patterns and the pixel electrode;
forming a data pattern including the data line, a source electrode, and a drain electrode on the substrate provided with the semiconductor pattern and the gate insulating pattern and exposing the transparent conductive films included in the data pad, the gate pad, the common pad, the common electrode, and the pixel electrode; and
forming a protective film on the substrate provided with the data pattern.
4. The method according to claim 1 , wherein the step of providing the color filter array substrate includes:
providing a common electrode for creating a vertical electric field with the pixel electrode.
5. The method according to claim 1 , wherein the step of exposing the transparent conductive film includes:
dry etching the protective film by an atmosphere plasma using the color filter array substrate as a mask.
6. The method according to claim 1 , wherein the step of exposing the transparent conductive film includes:
dry etching the protective film by a normal-pressure plasma using the color filter array substrate as a mask.
7. The method according to claim 1 , wherein the step of exposing the transparent conductive film includes:
wet etching the protective film exposed by the color filter array substrate by liquid crystal cells made by a joining of the color filter array substrate with the thin film transistor array substrate.